Machining platforms for creating tiny geometries in the micron range demand motion systems that provide a consistent, accurate and dynamic processing in multiple dimensions. As the size and mass of the manufactured parts may be challenging and particles may be formed during machining, the system components used need to be highly precise, stiff, robust and offer reliable performance.
Key Features of the Stages
- Reference edge to support the alignment in the machine
- Connector for purge air to create overpressure
- Side seal and hard cover to protect against particles
- Robust industrial IP65 connectors for flexible cable exit
- Easy access to the lubrication system
- Different encoder variants including absolute-measuring sensors offering nanometer resolution
- Different stage widths for different loads and cantilever reduction

Laser Positioning
- Synchronous servo motor
- Heavy-duty recirculating ball bearings
- Holding brake
- Ability to run directly on 110/240 volt AC

Workpiece Positioning
- Ironless magnetic direct drive linear motors
- Heavy-duty recirculating ball bearings
- XY configuration without adapter plate
- XY drag chain cable management

Motion Control
- ACS SPiiPlus EtherCAT® network motion controllers and drive modules for optimum synchronization of the axes and simultaneous control of the laser
- The Laser Control Module (LCM) can control a laser source directly with full synchronization to the motion path. LCM is able to interface with a wide range of lasers such as DPSS, CO2, excimer, fiber, Q-switched, picosecond, or femtosecond. It is also suitable for position based triggering applications for test and inspection tasks
System in Motion

The video shows the advantages of the linear stages for industrial laser micromachining
Further Industries and Applications that Benefit from this Motion Solution

Laser Material Processing: Drilling – Welding

Electronics Manufacturing: PCB Drilling – Inspection – Component Placement

Automotive: Fascia Machining – Surface Structuring – Additive Manufacturing – Testing and Inspection

Medical: Hermetic Seam Welding – Tissue Engineering – Inspection – Metrology