Industrial Optical Inspection

Flexible Configuration – Fast Step- and-Settle – Nanometer Resolution

Optical inspection is an essential process in industrial quality assurance. Optical inspection systems, which are used in industrial environments, should provide reliable and repeatable measurement results and enable high throughput rates. This also applies to the movement of the workpiece, specimen or test specimen, and to the positioning of the imaging optics. The positioning systems used, must be flexible in order to move the sample in the plane along different travel ranges and the optical components in the vertical direction.

Key Features of the Positioning Solution

Flexible Configuration
High repeatability and nanometer precision
High-resolution position sensors
Measuring using auto-focus algorithms
Focusing on different focal planes
Flexible adaptation to the required performance characteristics through PIMag® Motors
Easy integration into the automation environment via industrial EtherCAT® Interface

Positioning of the Imaging Optics

High scanning speed and fast step-and-settle due to magnetic plunger coil drive
Adjustable weight compensation for flexible lens masses
High-resolution, direct-measuring position sensors
Flexible adaptation of drive force and dimensions due to PIMag® voice coil motors

Sample Positioning

High scanning speeds due to magnetic linear motors
Serial axis combinations for flexibly configurable travel ranges on the sample level or integrated XY stages for space-saving design
Flexible adaptation of drive force and dimensions due to PIMag® linear motors
High-resolution, direct-measuring position sensors

Motion Control

Optional industrial EtherCAT® interface
Digital control with optimized control algorithms for constant scanning speed, high repeatability, and fast step-and-settle
Fast sensor signal processing for simultaneous high speeds with high resolution
Optional analog inputs for external control signals

Industrial Optical Inspection

Flexible Configuration – Fast Step- and-Settle – Nanometer Resolution

Key Features of the Positioning Solution

Positioning of the Imaging Optics

Sample Positioning

Motion Control

Systems in Motion

Video shows a V-508 compact linear stage driven by a linear motor developed in-house.

Further Industries and Applications that Benefit from this Motion Solution

Biomedical Engineering

Laser Material Processing

Electronics Manufacturing

Semiconductor Industry

Flat-Panel Production

Microscopy

Microstructure Technology