Laser Drilling of High-Density Micro Holes

Combined Motion Technologies for High Precision, High Aspect Ratio and Fast Drilling

When laser drilling the smallest high-density holes, many factors such as cone shape control as well as spot size and wavelength of the laser will have an impact on the result. In addition, fast and precise positioning of the workpiece, the laser head and the laser focus height is important. With the right combination of appropriate motion technologies and user-friendly control strategies to synchronize laser power, repetition rates and laser frequency with motion, it is possible to maintain hole accuracy and density over a wide range, thus increasing the throughput and quality of the laser drilling process.

Key Features of the Motion Solution

High-precision feature shape and taper control
Increased hole density and throughput
Consistent, clean, and fast drilling process
Easy implementation and laser control
Non-proprietary open control network

Z Axis – Reliable Laser Height Control

High-precision ball screw linear stage with servo motor and holding brake for safe and reliable operation under high loads
Absolute encoders to avoid collisions
Robust industrial IP65 connectors for flexible cable exits
Side seal and hard cover to protect from particles

Z Axis – Dynamic Laser Focusing for Taper Control

Voice coil direct-drive motor for friction-free operation and high scan frequencies
Fast step-and-settle
Integrated linear encoders for accurate position feedback
Adjustable weight force compensation for safe operation
Easy integration thanks to flexible mounting options

XY Axis – Fine Positioning of the Workpiece

Piezo-based XY scanner for highly-dynamic positioning with nanometer precision
Parallel-kinematic design for equal dynamics in X- and Y-directions
High guiding accuracy thanks to zero-play flexure guides
Subnanometer resolution with long-term stability
Fast ms settling times
High tracking accuracy in the nanometer range

XY Axis – Workpiece Positioning Over Extended Travels

Highly-dynamic ironless linear motors for fast and precise contouring
Reference edge for easing alignment in the machine
Connector for purge air, plus side seal, and hard cover, to protect against particles
Absolute encoders avoid referencing and ensure safety during operation

Flexible and Easy Automation Control

Profile generation via EtherCAT® or triggering of predefined drilling profiles
Intuitive browser-based software for system operation
Laser pulse control via EtherCAT® or analog power output
Servo control for fast step-and-settle and for disturbance rejection
Option of adding fast piezo control for improved performance