Ürünler - Nano Dünya

P-612.2 XY Piezo Nanopositioner

Compact, with Aperture

Compact: Surface 60 mm × 60 mm
100 µm × 100 µm closed-loop travel range (130 µm × 130 µm, open loop)
For cost-critical applications
Clear aperture 20 mm × 20 mm
Parallel kinematics for faster response times and higher multi-axis accuracy
Outstanding lifetime thanks to PICMA® piezo actuators
Also available as compact version

P-612.2, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Ürün Bilgileri Bilgiler Özellikler İndirmeler Taklif İste

Application fields

Scanning microscopy
High-throughput microscopy
Super-resolution microscopy
Mask / wafer positioning
Interferometry
Measuring technology
Biotechnology
Micromanipulation

Outstanding lifetime due to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.

Motion	P-612.20L	P-612.2SL	Tolerance
Active axes	X Y	X Y
Travel range in X, open loop, at -20 to 120 V	130 µm	130 µm	+20 / -0 %
Travel range in Y, open loop, at -20 to +120 V	130 µm	130 µm	+20 / -0 %
Pitch (Rotational crosstalk in θX with motion in Y)	± 10 µrad	± 10 µrad	typ.
Pitch (Rotational crosstalk in θY with motion in X)	± 10 µrad	± 10 µrad	typ.
Yaw (Rotational crosstalk in θZ with motion in X)	± 10 µrad	± 10 µrad	typ.
Yaw (Rotational crosstalk in θZ with motion in Y)	± 50 µrad	± 50 µrad	typ.
Travel range in X		100 µm
Travel range in Y		100 µm
Linearity error		0.4 %	typ.
Positioning	P-612.20L	P-612.2SL	Tolerance
Resolution in X, open loop	0.8 nm	0.8 nm	typ.
Resolution in Y, open loop	0.8 nm	0.8 nm	typ.
Integrated sensor		SGS, indirect position measuring
System resolution in X		5 nm
System resolution in Y		5 nm
Repeatability in X		< 10 nm	typ.
Repeatability in Y		< 10 nm	typ.
Drive Properties	P-612.20L	P-612.2SL	Tolerance
Drive type	PICMA®	PICMA®
Electrical capacitance	1.5 µF	1.5 µF	±20 %
Mechanical Properties	P-612.20L	P-612.2SL	Tolerance
Guide	Flexure guide with lever amplification	Flexure guide with lever amplification
Stiffness in X	0.15 N/µm	0.15 N/µm	±20 %
Stiffness in Y	0.15 N/µm	0.15 N/µm	±20 %
Resonant frequency in X, unloaded	400 Hz	400 Hz	±20 %
Resonant frequency in X, under load with 100 g	200 Hz	200 Hz	±20 %
Resonant frequency in Y, unloaded	400 Hz	400 Hz	±20 %
Resonant frequency in Y, under load with 100 g	200 Hz	200 Hz	±20 %
Permissible push force in X	15 N	15 N	max.
Permissible push force in Y	15 N	15 N	max.
Permissible push force in Z	15 N	15 N	max.
Permissible pull force in X	5 N	5 N	max.
Permissible pull force in Y	5 N	5 N	max.
Overall mass	105 g	105 g	±5 %
Material	Aluminum, steel	Aluminum, steel
Miscellaneous	P-612.20L	P-612.2SL	Tolerance
Operating temperature range	-20 to 80 °C	-20 to 80 °C
Connector	LEMO FFA.00.250.CTAC22	LEMO FFA.00.250.CTAC22
Cable length	1.5 m	1.5 m	±10 mm
Recommended controllers / drivers	E-503, E-505, E-621	E-503, E-505, E-621
Sensor connector		LEMO FFA.0S.304.CLAC32

3D Modeller

3-D-model P-612.xxL

Versiyon / Tarih

zip - 179 KB

Listeye Ekle Listeden Çıkar

Dokümantasyon

Short Instructions PZ240

Piezo Positioning Systems: P-5xx / P-6xx / P-7xx

Versiyon / Tarih

6.1.0 10/2019
pdf - 1 MB

İndir

Dokümantasyon

User Manual PZ280

P-612 XY Nanopositioning Systems and Vertical Nanopositioning Stages

Versiyon / Tarih

1.0.0 2017-04-27
pdf - 2 MB

Listeye Ekle Listeden Çıkar

Dokümantasyon

Datasheet P-612.2

Versiyon / Tarih

2023-04-11
pdf - 469 KB

İndir

Ürün Notu

Product Change Notification Piezo Actuator Driven Products

Versiyon / Tarih

2021-04-19
pdf - 377 KB

İndir

P-612.20L

XY piezo nanopositioner; 130 µm × 130 µm travel range (open loop) (X × Y); aperture 20 mm × 20 mm; LEMO connectors; 1.5 m cable length

Teklif Listesine Ekle Teklif Listesinden Çıkar

P-612.2SL

XY piezo nanopositioner; 100 µm × 100 µm travel range (X × Y); aperture 20 mm × 20 mm; SGS, indirect position measuring; LEMO connectors; 1.5 m cable length

Teklif Listesine Ekle Teklif Listesinden Çıkar

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