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P-620.2 – P-629.2 PIHera XY Piezo Stage

High-precision XY Nanopositioners with Variable Travel Ranges

Travel ranges 50 to 1800 µm
Resolution to 0.1 nm
Positioning accuracy 0.02 %
Direct position measuring with capacitive sensors
X, XY, Z, XYZ versions

P-62x.2CD/.2CL/.20L, dimensions in mm.

Ürün Bilgileri Bilgiler Özellikler İndirmeler Taklif İste

Application fields

Interferometry
Microscopy
Nanopositioning
Biotechnology
Test procedures and quality assurance
Photonics
Fiber positioning
Semiconductor technology

Outstanding lifetime due to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimal repeatability, outstanding stability, and stiff, fast-responding control.

Motion	Filter	P-620.20L	P-620.2CD	P-620.2CL	P-621.20L	P-621.2CD	P-621.2CL	P-622.20L	P-622.2CD	P-622.2CL	P-625.20L	P-625.2CD	P-625.2CL	P-628.20L	P-628.2CD	P-628.2CL	P-629.2CD	P-629.2CL	Tolerance
Active axes		X Y	X Y	X Y	X Y	X Y	X Y	X Y	X Y	X Y	X Y	X Y	X Y	X Y	X Y	X Y	X Y	X Y
Travel range in X, open loop	-	60 µm	60 µm	60 µm	120 µm	120 µm	120 µm	300 µm	300 µm	300 µm	600 µm	600 µm	600 µm	1000 µm	1000 µm	1000 µm	1800 µm	1800 µm	±20 %
Travel range in Y, open loop	-	60 µm	60 µm	60 µm	120 µm	120 µm	120 µm	300 µm	300 µm	300 µm	600 µm	600 µm	600 µm	1000 µm	1000 µm	1000 µm	1800 µm	1800 µm	±20 %
Pitch (Rotational crosstalk in θX with motion in Y)	-	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 20 µrad	± 20 µrad	± 20 µrad	± 30 µrad	± 30 µrad	typ.
Pitch (Rotational crosstalk in θY with motion in X)	-	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 20 µrad	± 20 µrad	± 20 µrad	± 30 µrad	± 30 µrad	typ.
Yaw (Rotational crosstalk in θZ with motion in X)	-	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 5 µrad	± 5 µrad	± 5 µrad	± 5 µrad	± 5 µrad	± 5 µrad	± 5 µrad	± 5 µrad	typ.
Yaw (Rotational crosstalk in θZ with motion in Y)	-	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 5 µrad	± 5 µrad	± 5 µrad	± 5 µrad	± 5 µrad	± 5 µrad	± 5 µrad	± 5 µrad	typ.
Travel range in X	-		50 µm	50 µm		100 µm	100 µm		250 µm	250 µm		500 µm	500 µm		800 µm	800 µm	1500 µm	1500 µm
Travel range in Y	-		50 µm	50 µm		100 µm	100 µm		250 µm	250 µm		500 µm	500 µm		800 µm	800 µm	1500 µm	1500 µm
Linearity error in X	-		0.02 %	0.02 %		0.02 %	0.02 %		0.02 %	0.02 %		0.03 %	0.03 %		0.03 %	0.03 %	0.03 %	0.03 %	typ.
Linearity error in Y	-		0.02 %	0.02 %		0.02 %	0.02 %		0.02 %	0.02 %		0.03 %	0.03 %		0.03 %	0.03 %	0.03 %	0.03 %	typ.
Positioning	Filter	P-620.20L	P-620.2CD	P-620.2CL	P-621.20L	P-621.2CD	P-621.2CL	P-622.20L	P-622.2CD	P-622.2CL	P-625.20L	P-625.2CD	P-625.2CL	P-628.20L	P-628.2CD	P-628.2CL	P-629.2CD	P-629.2CL	Tolerance
Resolution in X, open loop	-	0.1 nm	0.1 nm	0.1 nm	0.2 nm	0.2 nm	0.2 nm	0.4 nm	0.4 nm	0.4 nm	0.5 nm	0.5 nm	0.5 nm	0.5 nm	0.5 nm	0.5 nm	2 nm	2 nm	typ.
Resolution in Y, open loop	-	0.1 nm	0.1 nm	0.1 nm	0.2 nm	0.2 nm	0.2 nm	0.4 nm	0.4 nm	0.4 nm	0.5 nm	0.5 nm	0.5 nm	0.5 nm	0.5 nm	0.5 nm	2 nm	2 nm	typ.
Integrated sensor			Capacitive, direct position measuring	Capacitive, direct position measuring		Capacitive, direct position measuring	Capacitive, direct position measuring		Capacitive, direct position measuring	Capacitive, direct position measuring		Capacitive, direct position measuring	Capacitive, direct position measuring		Capacitive, direct position measuring	Capacitive, direct position measuring	Capacitive, direct position measuring	Capacitive, direct position measuring
System resolution in X	-		0.2 nm	0.2 nm		0.4 nm	0.4 nm		0.7 nm	0.7 nm		1.4 nm	1.4 nm		3.5 nm	3.5 nm	3.5 nm	3.5 nm
System resolution in Y	-		0.2 nm	0.2 nm		0.4 nm	0.4 nm		0.7 nm	0.7 nm		1.4 nm	1.4 nm		3.5 nm	3.5 nm	3.5 nm	3.5 nm
Bidirectional repeatability in X	-		± 2 nm	± 2 nm		± 2 nm	± 2 nm		± 2 nm	± 2 nm		± 5 nm	± 5 nm		± 10 nm	± 10 nm	± 14 nm	± 14 nm	typ.
Bidirectional repeatability in Y	-		± 2 nm	± 2 nm		± 2 nm	± 2 nm		± 2 nm	± 2 nm		± 5 nm	± 5 nm		± 10 nm	± 10 nm	± 14 nm	± 14 nm	typ.
Drive Properties	Filter	P-620.20L	P-620.2CD	P-620.2CL	P-621.20L	P-621.2CD	P-621.2CL	P-622.20L	P-622.2CD	P-622.2CL	P-625.20L	P-625.2CD	P-625.2CL	P-628.20L	P-628.2CD	P-628.2CL	P-629.2CD	P-629.2CL	Tolerance
Drive type		PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®
Electrical capacitance in X	-	0.35 µF	0.35 µF	0.35 µF	1.5 µF	1.5 µF 3D Modeller 3D Modeller P-62x.2 STEP Versiyon / Tarih zip - 1,011 KB Listeye Ekle Listeden Çıkar Veri Sayfası Veri Sayfası Datasheet P-620.2 – P-629.2 Versiyon / Tarih 2021-11-11 pdf - 364 KB Listeye Ekle Listeden Çıkar Dokümantasyon Dokümantasyon Short Instructions PZ240 Piezo Positioning Systems: P-5xx / P-6xx / P-7xx Versiyon / Tarih 6.1.0 10/2019 pdf - 1 MB İndir Dokümantasyon User Manual PZ234 P-620, P-621, P-622, P-625, P-628, P-629 PIHera Piezo Stages with Capacitive Sensors Versiyon / Tarih 1.3.0 2021-11-03 pdf - 3 MB Listeye Ekle Listeden Çıkar Ürün Notu Ürün Notu Product Change Notification Piezo Actuator Driven Products Versiyon / Tarih 2021-04-19 pdf - 377 KB İndir P-620.20L PIHera precision XY nanopositioner, 60 µm × 60 µm, without sensors, LEMO connectors Teklif Listesine Ekle Teklif Listesinden Çıkar P-620.2CD PIHera precision XY nanopositioner, 50 µm × 50 µm, direct position measuring, capacitive sensors, D-sub connectors Teklif Listesine Ekle Teklif Listesinden Çıkar P-620.2CL PIHera precision XY nanopositioner, 50 µm × 50 µm, direct position measuring, capacitive sensors, LEMO connectors Teklif Listesine Ekle Teklif Listesinden Çıkar P-621.20L PIHera precision XY nanopositioner, 120 µm × 120 µm, without sensors, LEMO connectors Teklif Listesine Ekle Teklif Listesinden Çıkar P-621.2CD PIHera precision XY nanopositioner, 100 µm × 100 µm, direct position measuring, capacitive sensors, D-sub connectors Teklif Listesine Ekle Teklif Listesinden Çıkar P-621.2CL PIHera precision XY nanopositioner, 100 µm × 100 µm, direct position measuring, capacitive sensors, LEMO connectors Teklif Listesine Ekle Teklif Listesinden Çıkar P-622.20L PIHera precision XY nanopositioner, 300 µm × 300 µm, without sensors, LEMO connectors Teklif Listesine Ekle Teklif Listesinden Çıkar P-622.2CD PIHera precision XY nanopositioner, 250 µm × 250 µm, direct position measuring, capacitive sensors, D-sub connectors Teklif Listesine Ekle Teklif Listesinden Çıkar P-622.2CL PIHera precision XY nanopositioner, 250 µm × 250 µm, direct position measuring, capacitive sensors, LEMO connectors Teklif Listesine Ekle Teklif Listesinden Çıkar P-625.20L PIHera precision XY nanopositioner, 600 µm × 600 µm, without sensors, LEMO connectors Teklif Listesine Ekle Teklif Listesinden Çıkar P-625.2CD PIHera precision XY nanopositioner, 500 µm × 500 µm, direct position measuring, capacitive sensors, D-sub connectors Teklif Listesine Ekle Teklif Listesinden Çıkar P-625.2CL PIHera precision XY nanopositioner, 500 µm × 500 µm, direct position measuring, capacitive sensors, LEMO connectors Teklif Listesine Ekle Teklif Listesinden Çıkar P-628.20L PIHera precision XY nanopositioner, 1000 µm × 1000 µm, without sensors, LEMO connectors Teklif Listesine Ekle Teklif Listesinden Çıkar P-628.2CD PIHera precision XY nanopositioner, 800 µm × 800 µm, direct position measuring, capacitive sensors, D-sub connectors Teklif Listesine Ekle Teklif Listesinden Çıkar P-628.2CL PIHera precision XY nanopositioner, 800 µm × 800 µm, direct position measuring, capacitive sensors, LEMO connectors Teklif Listesine Ekle Teklif Listesinden Çıkar P-629.2CD PIHera precision XY nanopositioner, 1500 µm × 1500 µm, direct position measuring, capacitive sensors, D-sub connectors Teklif Listesine Ekle Teklif Listesinden Çıkar P-629.2CL PIHera precision XY nanopositioner, 1500 µm × 1500 µm, direct position measuring, capacitive sensors, LEMO connectors Teklif Listesine Ekle Teklif Listesinden Çıkar İlgili Ürünler P-611.XZ • P-611.2 XZ and XYZ Nanopositioner Compact Two-Axis Piezo Nanopositioner Geçmişin gücüyle geleceğe yön verin. Menu Ana Sayfa Hakkimizda Ürünler İletişim Bilgi Bankası İndirmeler Ürün ve Sistem Bilgileri Blog Uzmanlık Sektörler Teknolojiler Genel Bilgiler Kişisel Veriler Aydınlatma Metni Çerez Politikası Temsilciliklerimiz Nano Position Seramik USA İletişim Nano Dünya Mak. San. Tic. Ltd. Şti. Parseller Mah. Gündoğan Sok. No:8/A Ümraniye/İstanbul 02166140039 info@nanodunya.com.tr Copyright © 2024 by Nano Dünya. Tüm Hakları Saklıdır x Teklif Listesi Teklif listeniz şu anda boş. Teklif Formu x Döküman Talebi İndirme listeniz şu anda boş. Talep Formu 0 0 Whatsapp