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M-110 • M-111 • M-112 V6 Vacuum-Compatible Compact Linear Stage

XY(Z) Combinations with DC Gear Motor, Various Travel Range Variants

Suitable for vacuum up to 10^-6 hPa
Very compact due to folded drive
Closed-loop DC motors
Travel ranges: 5, 15, and 25 mm
Noncontact reference and limit switches
XY setups can be mounted directly

M-11x.1VG1, dimensions in mm. Note that a comma is used in the drawing instead of a decimal point.

Ürün Bilgileri Bilgiler Özellikler İndirmeler Taklif İste

Compact linear stage, versatile in use

Linear stage with compact size due to folded drive with belt drive. Clear aperture with 10 mm Ø. XY setups can be mounted directly without adapter plate.

Reduced outgassing especially for use in vacuum environments

Most notably, for the lubrication of the guides and the spindle a material with particularly low outgassing is used. This allows a bakeout temperature of up to 80° C. With this and other modifications of the PI V6 vacuum class, this positioner can be used up to 10^-6hPa.

Drive

Closed-loop DC gear motor
Backlash-compensated threaded spindle

Position measuring

Rotary encoder on the motor shaft
Noncontact Hall effect reference and limit switches

Application fields

Vacuum chambers. Research. Beamline instrumentation. Microscopy. Electronics assembly and inspection.

Motion	M-110.1VG1	M-111.1VG1	M-112.1VG1	Tolerance
Active axes	X	X	X
Travel range in X	5 mm	15 mm	25 mm
Maximum velocity in X, unloaded	1 mm/s	1.5 mm/s	1.5 mm/s
Positioning	M-110.1VG1	M-111.1VG1	M-112.1VG1	Tolerance
Unidirectional repeatability in X	0.25 µm	0.25 µm	0.25 µm	typ.
Bidirectional repeatability in X	± 2 µm	± 2 µm	± 2 µm	typ.
Minimum incremental motion in X	0.05 µm	0.05 µm	0.05 µm	typ.
Backlash in X	3 µm	3 µm	3 µm	typ.
Reference switch	Hall effect	Hall effect	Hall effect
Limit switches	Hall effect	Hall effect	Hall effect
Motor encoder	Incremental rotary encoder	Incremental rotary encoder	Incremental rotary encoder
Resolution, motor encoder	2048 Cts./rev.	2048 Cts./rev.	2048 Cts./rev.
Motor encoder: Sensor signal	A/B quadrature, RS-422	A/B quadrature, RS-422	A/B quadrature, RS-422
Drive Properties	M-110.1VG1	M-111.1VG1	M-112.1VG1	Tolerance
Drive type	DC gear motor	DC gear motor	DC gear motor
Nominal voltage	12 V	12 V	12 V
Nominal current, RMS	0.16 A	0.32 A	0.32 A	typ.
Drive force in negative direction of motion in X	10 N	10 N	10 N	typ.
Drive force in positive direction of motion in X	10 N	10 N	10 N	typ.
Mechanical Properties	M-110.1VG1	M-111.1VG1	M-112.1VG1	Tolerance
Guide	Ball guide	Ball guide	Ball guide
Drive screw type	Fine-threaded spindle	Fine-threaded spindle	Fine-threaded spindle
Drive screw pitch	0.4 mm	0.4 mm	0.4 mm
Gear ratio i	256 : 9	256 : 9	256 : 9
Holding force in X, passive	10 N	10 N	10 N
Moved mass in X, unloaded	11 g	11 g	11 g
Permissible push force in Y	15 N	10 N	10 N	max.
Permissible push force in Z	30 N	30 N	20 N	max.
Permissible torque in θx	0.15 N·m	0.15 N·m	0.15 N·m	max.
Permissible torque in θY	0.15 N·m	0.15 N·m	0.15 N·m	max.
Permissible torque in θZ	0.15 N·m	0.15 N·m	0.15 N·m	max.
Overall mass	250 g	270 g	300 g
Material	Anodized aluminum	Anodized aluminum	Anodized aluminum
Miscellaneous	M-110.1VG1	M-111.1VG1	M-112.1VG1	Tolerance
Connector	HD D-sub 26-pin (m)	HD D-sub 26-pin (m)	HD D-sub 26-pin (m)
Vacuum class	10⁻⁶ hPa	10⁻⁶ hPa	10⁻⁶ hPa
Recommended controllers / drivers	C-863 C-884 G-901 G-910 ACS modular controller	C-863 C-884 G-901 G-910 ACS modular controller	C-863 C-884 G-901 G-910 ACS modular controller
Cable length	0.5 m	0.5 m	0.5 m
Operating temperature range	-20 to 65 °C	-20 to 65 °C	-20 to 65 °C

Note on minimum incremental motion: Values are achieved with the recommended controller
Note on nominal current: Values apply per phase

3D Modeller

3-D model M-11x.xxx1 V6

Versiyon / Tarih

2020-03-30
,zip - 5 MB,

Listeye Ekle Listeden Çıkar

Veri Sayfası

Datasheet M-110 • M-111 • M-112 V6

Versiyon / Tarih

2022-05-30
,,pdf - 580 KB,,

İndir

Veri Sayfası

Datasheet M-11x.xxx1 V

Versiyon / Tarih

2020-10-08
,pdf - 790 KB,

İndir

Dokümantasyon

Short Instructions MP119EK

Positioners with Electric Motors: M-06x, M-11x, M-12x, M-4xx, M-5xx

Versiyon / Tarih

3.2.0 01/2021
,pdf - 1 MB,

İndir

Dokümantasyon

User Manual M110T0032

M-110.xxx1 / M-111.xxx1 / M-112.xxx1 Microtranslation Stage

Versiyon / Tarih

2023-07-25
,pdf - 1 MB,

Listeye Ekle Listeden Çıkar

M-110.1VG1

Vacuum-compatible compact linear stage; DC gear motor; 5 mm travel range; 30 N load capacity; 1 mm/s maximum velocity; fine-threaded spindle; incremental rotary encoder, 2048 cts./rev. resolution, A/B quadrature, RS-422; vacuum compatible to 10-6 hPa; 0.5 m cable length

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M-111.1VG1

Vacuum-compatible compact linear stage; DC gear motor; 15 mm travel range; 30 N load capacity; 1.5 mm/s maximum velocity; fine-threaded spindle; incremental rotary encoder, 2048 cts./rev. resolution, A/B quadrature, RS-422; vacuum compatible to 10-6 hPa; 0.5 m cable length

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M-112.1VG1

Vacuum-compatible compact linear stage; DC gear motor; 25 mm travel range; 20 N load capacity; 1.5 mm/s maximum velocity; fine-threaded spindle; incremental rotary encoder, 2048 cts./rev. resolution, A/B quadrature, RS-422; vacuum compatible to 10-6 hPa; 0.5 m cable length

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