Ürünler - Nano Dünya

A-62x PIglide RM Rotation Stage with Air Bearings

Friction-Free, Ideal for Indexing, Positioning, Scanning, Measuring Technology

Cleanroom compatible
Motion platform diameter from 50 mm to 300 mm
Load capacity to 4170 N
Eccentricity and flatness < 200 nm
Can be mounted vertically or horizontally

A-627.075xx, dimensions in mm

A-621.025xx, dimensions in mm

A-623.xxxxx, dimensions in mm (A-623.025xx: A=75 mm; B=90 mm; A-623.050xx: A=100 mm; B=115 mm)

A-624.050xx, dimensions in mm

A-625.065xx, dimensions in mm

Ürün Bilgileri Bilgiler Özellikler İndirmeler Taklif İste

Product overview

The PIglide RM series of motorized rotation stages are designed for accuracy, precision, high stiffness, and ease of use, and can be mounted in any orientation.

Various options can be combined to create a solution ideal for point-to-point indexing or constant velocity scanning.

The RM stages offer superior travel accuracy, flatness, and wobble performance. Because they are friction free and require no maintenance or lubrication, they are ideal for use in cleanrooms.

3-Phase torque motor

Brushless
Slotless
Low cogging torque

Absolute encoder (optional)

Absolute encoders supply explicit position information that enables immediate determination of the position. Therefore, no referencing is necessary when switching on and this increases efficiency and safety during operation.

Accessories and options

Encoder
Optional tip/tilt platform
Custom mounting flanges
Vacuum feedthrough
Slip rings
PIglide filter and air preparation kits
Single or multi-axis motion controllers and servo drives
Base plates made of granite and systems for reducing vibration

Application fields

Optical alignment, metrology, inspection systems, calibration, scanning.

Motion	A-621.025A1	A-621.025B1	A-623.025A1	A-623.025B1	A-623.050A1	A-623.050B1	A-624.050A1	A-624.050B1	A-625.065A1	A-625.065B1	A-627.075A1	A-627.075B1	Tolerance
Active axes	θZ	θZ	θZ	θZ	θZ	θZ	θZ	θZ	θZ	θZ	θZ	θZ
Rotation range in θZ	360 °	360 °	360 °	360 °	360 °	360 °	360 °	360 °	360 °	360 °	360 °	360 °
Maximum angular velocity in θZ, unloaded	2500 min⁻¹	2500 min⁻¹	1200 min⁻¹	1200 min⁻¹	1200 min⁻¹	1200 min⁻¹	600 min⁻¹	600 min⁻¹	500 min⁻¹	500 min⁻¹	500 min⁻¹	500 min⁻¹
Linear crosstalk in X with motion in θZ	± 0.15 µm	± 0.15 µm	± 0.087 µm	± 0.087 µm	± 0.087 µm	± 0.087 µm	± 0.05 µm	± 0.05 µm	± 0.05 µm	± 0.05 µm	± 0.037 µm	± 0.037 µm	max.
Linear crosstalk in Y with motion in θZ	± 0.15 µm	± 0.15 µm	± 0.087 µm	± 0.087 µm	± 0.087 µm	± 0.087 µm	± 0.05 µm	± 0.05 µm	± 0.05 µm	± 0.05 µm	± 0.037 µm	± 0.037 µm	max.
Linear crosstalk in Z with motion in θZ	± 0.05 µm	± 0.05 µm	± 0.037 µm	± 0.037 µm	± 0.037 µm	± 0.037 µm	± 0.025 µm	± 0.025 µm	± 0.025 µm	± 0.025 µm	± 0.02 µm	± 0.02 µm	max.
Rotational crosstalk in θX with motion in θZ	± 2.5 µrad	± 2.5 µrad	± 1.5 µrad	± 1.5 µrad	± 1.5 µrad	± 1.5 µrad	± 1 µrad	± 1 µrad	± 1 µrad	± 1 µrad	± 0.5 µrad	± 0.5 µrad	max.
Rotational crosstalk in θY with motion in θZ	± 2.5 µrad	± 2.5 µrad	± 1.5 µrad	± 1.5 µrad	± 1.5 µrad	± 1.5 µrad	± 1 µrad	± 1 µrad	± 1 µrad	± 1 µrad	± 0.5 µrad	± 0.5 µrad	max.
Positioning	A-621.025A1	A-621.025B1	A-623.025A1	A-623.025B1	A-623.050A1	A-623.050B1	A-624.050A1	A-624.050B1	A-625.065A1	A-625.065B1	A-627.075A1	A-627.075B1	Tolerance
Integrated sensor	Incremental angle-measuring system	Absolute angle-measuring system	Incremental angle-measuring system	Absolute angle-measuring system	Incremental angle-measuring system	Absolute angle-measuring system	Incremental angle-measuring system	Absolute angle-measuring system	Incremental angle-measuring system	Absolute angle-measuring system	Incremental angle-measuring system	Absolute angle-measuring system
Bidirectional repeatability in θZ	± 4 µrad	± 4 µrad	± 4 µrad	± 4 µrad	± 4 µrad	± 4 µrad	± 4 µrad	± 4 µrad	± 4 µrad	± 4 µrad	± 4 µrad	± 4 µrad	typ.
Positioning accuracy in θZ, calibrated	± 8 µrad	± 8 µrad	± 8 µrad	± 8 µrad	± 8 µrad	± 8 µrad	± 8 µrad	± 8 µrad	± 8 µrad	± 8 µrad	± 8 µrad	± 8 µrad	typ.
Sensor signal	Sin/cos, 1 V peak-peak	BiSS-C	Sin/cos, 1 V peak-peak	BiSS-C	Sin/cos, 1 V peak-peak	BiSS-C	Sin/cos, 1 V peak-peak	BiSS-C	Sin/cos, 1 V peak-peak	BiSS-C	Sin/cos, 1 V peak-peak	BiSS-C
Sensor resolution	0.047 nm	0.015 nm	0.024 nm	0.015 nm	0.024 nm	0.015 nm	0.016 nm	0.015 nm	0.012 nm	0.015 nm	0.008 nm	0.015 nm
Sensor signal periods / U	8192		15744		15744		23600		31488		47200
Sensor resolution, rotational	0.047 µrad	0.0015 µrad	0.024 µrad	0.0015 µrad	0.016 µrad	0.0015 µrad	0.016 µrad	0.0015 µrad	0.012 µrad	0.0015 µrad	0.008 µrad	0.0015 µrad
Reference switch	1 / revolution, differential pulse over one sensor signal period, 1 V peak-peak		1 / revolution, differential pulse over one sensor signal period, 1 V peak-peak		1 / revolution, differential pulse over one sensor signal period, 1 V peak-peak		1 / revolution, differential pulse over one sensor signal period, 1 V peak-peak		1 / revolution, one count over one step of the encoder, synchronized to output signal	1 / revolution, one count over one step of the encoder, synchronized to output signal	1 / revolution, differential pulse over one sensor signal period, 1 V peak-peak
Drive Properties	A-621.025A1	A-621.025B1	A-623.025A1	A-623.025B1	A-623.050A1	A-623.050B1	A-624.050A1	A-624.050B1	A-625.065A1	A-625.065B1	A-627.075A1	A-627.075B1	Tolerance
Drive type	Ironless 3-phase torque motor	Ironless 3-phase torque motor	Ironless 3-phase torque motor	Ironless 3-phase torque motor	Ironless 3-phase torque motor	Ironless 3-phase torque motor	Ironless 3-phase torque motor	Ironless 3-phase torque motor	Ironless 3-phase torque motor	Ironless 3-phase torque motor	Ironless 3-phase torque motor	Ironless 3-phase torque motor
Nominal voltage	48 V	48 V	48 V	48 V	48 V	48 V	48 V	48 V	48 V	48 V	48 V	48 V
Peak voltage	80 V	80 V	80 V	80 V	80 V	80 V	80 V	80 V	80 V	80 V	80 V	80 V
Nominal current, RMS	3.3 A	3.3 A	3.1 A	3.1 A	3.1 A	3.1 A	2.3 A	2.3 A	2.3 A	2.3 A	4.5 A	4.5 A	typ.
Peak current, RMS	9.9 A	9.9 A	9.3 A	9.3 A	9.3 A	9.3 A	6.9 A	6.9 A	6.9 A	6.9 A	13.9 A	13.9 A	typ.
Drive torque counterclockwise in θZ	0.07 N·m	0.07 N·m	0.7 N·m	0.7 N·m	0.7 N·m	0.7 N·m	1.57 N·m	1.57 N·m	1.57 N·m	1.57 N·m	2.82 N·m	2.82 N·m	max.
Drive torque clockwise in θZ	0.07 N·m	0.07 N·m	0.7 N·m	0.7 N·m	0.7 N·m	0.7 N·m	1.57 N·m	1.57 N·m	1.57 N·m	1.57 N·m	2.82 N·m	2.82 N·m	max.
Peak torque counterclockwise in θZ	0.21 N·m	0.21 N·m	2.1 N·m	2.1 N·m	2.1 N·m	2.1 N·m	4.71 N·m	4.71 N·m	4.71 N·m	4.71 N·m	8.46 N·m	8.46 N·m	max.
Peak torque clockwise in θZ	0.21 N·m	0.21 N·m	2.1 N·m	2.1 N·m	2.1 N·m	2.1 N·m	4.71 N·m	4.71 N·m	4.71 N·m	4.71 N·m	8.46 N·m	8.46 N·m	max.
Torque constant	0.03 N·m/A	0.03 N·m/A	0.26 N·m/A	0.26 N·m/A	0.26 N·m/A	0.26 N·m/A	0.59 N·m/A	0.59 N·m/A	0.59 N·m/A	0.59 N·m/A	0.61 N·m/A	0.61 N·m/A	typ.
Resistance phase-phase	2.7 Ω	2.7 Ω	4.2 Ω	4.2 Ω	4.2 Ω	4.2 Ω	6.7 Ω	6.7 Ω	6.7 Ω	6.7 Ω	4.5 Ω	4.5 Ω	typ.
Inductance phase-phase	0.1 mH	0.1 mH	0.4 mH	0.4 mH	0.4 mH	0.4 mH	0.9 mH	0.9 mH	0.9 mH	0.9 mH	0.6 mH	0.6 mH
Back EMF, phase-phase, rotational	4.1 V/kRPM	4.1 V/kRPM	31.8 V/kRPM	31.8 V/kRPM	31.8 V/kRPM	31.8 V/kRPM	71 V/kRPM	71 V/kRPM	71 V/kRPM	71 V/kRPM	74 V/kRPM	74 V/kRPM	max.
Number of pole pairs	6	6	14	14	14	14	24	24	24	24	32	32
Mechanical Properties	A-621.025A1	A-621.025B1	A-623.025A1	A-623.025B1	A-623.050A1	A-623.050B1	A-624.050A1	A-624.050B1	A-625.065A1	A-625.065B1	A-627.075A1	A-627.075B1	Tolerance
Bearing type	Air bearings with air preload	Air bearings with air preload	Air bearings with air preload	Air bearings with air preload	Air bearings with air preload	Air bearings with air preload	Air bearings with air preload	Air bearings with air preload	Air bearings with air preload	Air bearings with air preload	Air bearings with air preload	Air bearings with air preload
Journal length	25 mm	25 mm	25 mm	25 mm	50 mm	50 mm	50 mm	50 mm	65 mm	65 mm	75 mm	75 mm
Stiffness in X	8 N/µm	8 N/µm	18 N/µm	18 N/µm	35 N/µm	35 N/µm	64 N/µm	64 N/µm	110 N/µm	110 N/µm	204 N/µm	204 N/µm
Stiffness in Y	8 N/µm	8 N/µm	18 N/µm	18 N/µm	35 N/µm	35 N/µm	64 N/µm	64 N/µm	110 N/µm	110 N/µm	204 N/µm	204 N/µm
Stiffness in Z	26 N/µm	26 N/µm	96 N/µm	96 N/µm	96 N/µm	96 N/µm	210 N/µm	210 N/µm	385 N/µm	385 N/µm	788 N/µm	788 N/µm
Moved mass in θZ, unloaded	400 g	400 g	1200 g	1200 g	1400 g	1400 g	3200 g	3200 g	6900 g	6900 g	21500 g	21500 g	±5 %
Moment of inertia in θZ, unloaded	117 kg·mm²	117 kg·mm²	1740 kg·mm²	1740 kg·mm²	1780 kg·mm²	1780 kg·mm²	9930 kg·mm²	9930 kg·mm²	31730 kg·mm²	31730 kg·mm²	195200 kg·mm²	195200 kg·mm²	±20%
Permissible push force in X	57 N	57 N	115 N	115 N	229 N	229 N	344 N	344 N	577 N	577 N	1203 N	1203 N	max.
Permissible push force in Y	57 N	57 N	115 N	115 N	229 N	229 N	344 N	344 N	577 N	577 N	1203 N	1203 N	max.
Permissible push force in Z	134 N	134 N	536 N	536 N	536 N	536 N	1206 N	1206 N	2144 N	2144 N	4244 N	4244 N	max.
Permissible pull force in X	57 N	57 N	115 N	115 N	229 N	229 N	344 N	344 N	577 N	577 N	1203 N	1203 N	max.
Permissible pull force in Y	57 N	57 N	115 N	115 N	229 N	229 N	344 N	344 N	577 N	577 N	1203 N	1203 N	max.
Permissible pull force in Z	134 N	134 N	536 N	536 N	536 N	536 N	1206 N	1206 N	2144 N	2144 N	4244 N	4244 N	max.
Permissible torque in θx	0.57 N·m	0.57 N·m	1.7 N·m	1.7 N·m	4.52 N·m	4.52 N·m	22.6 N·m	22.6 N·m	39.6 N·m	39.6 N·m	141.3 N·m	141.3 N·m	max.
Permissible torque in θY	0.57 N·m	0.57 N·m	1.7 N·m	1.7 N·m	4.52 N·m	4.52 N·m	22.6 N·m	22.6 N·m	39.6 N·m	39.6 N·m	141.3 N·m	141.3 N·m	max.
Overall mass	1200 g	1200 g	3100 g	3100 g	4500 g	4500 g	8600 g	8600 g	14000 g	14000 g	50000 g	50000 g	±5 %
Material	Aluminum, stainless steel	Aluminum, stainless steel	Aluminum, stainless steel	Aluminum, stainless steel	Aluminum, stainless steel	Aluminum, stainless steel	Aluminum, stainless steel	Aluminum, stainless steel	Aluminum, stainless steel	Aluminum, stainless steel	Aluminum, stainless steel	Aluminum, stainless steel
Miscellaneous	A-621.025A1	A-621.025B1	A-623.025A1	A-623.025B1	A-623.050A1	A-623.050B1	A-624.050A1	A-624.050B1	A-625.065A1	A-625.065B1	A-627.075A1	A-627.075B1	Tolerance
Connector	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)
Sensor connector	D-sub 15-pole (m)	D-sub 15-pole (m)	D-sub 15-pole (m)	D-sub 15-pole (m)	D-sub 15-pole (m)	D-sub 15-pole (m)	D-sub 15-pole (m)	D-sub 15-pole (m)	D-sub 15-pole (m)	D-sub 15-pole (m)	D-sub 15-pole (m)	D-sub 15-pole (m)
Operating pressure	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa
Air consumption	56 L/min	56 L/min	56 L/min	56 L/min	56 L/min	56 L/min	56 L/min	56 L/min	56 L/min	56 L/min	56 L/min	56 L/min	max.
Air quality	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3
Recommended controllers / drivers	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x
Operating temperature range	15 to 25 °C	15 to 25 °C	15 to 25 °C	15 to 25 °C	15 to 25 °C	15 to 25 °C	15 to 25 °C	15 to 25 °C	15 to 25 °C	15 to 25 °C	15 to 25 °C	15 to 25 °C

3D Modeller

A-62x 3-D model

Versiyon / Tarih

2019-07-30
zip - 6 MB

Listeye Ekle Listeden Çıkar

Veri Sayfası

Datasheet A-62x

Versiyon / Tarih

2021-10-29
pdf - 2 MB

İndir

Dokümantasyon

User Manual A-62x

Versiyon / Tarih

1.4 2021-05-07
pdf - 2 MB

Listeye Ekle Listeden Çıkar

Teknik İncelemeler

Air Bearings: When to Use and When to Avoid in Your Motion Application

All Positioning Stages are not Created Equal. Author: Matt Reck, PI

Versiyon / Tarih

WP4003 2015-09
pdf - 3 MB

İndir

A-621.025A1

PIglide RM rotation stage, air bearing, 50 mm motion platform diameter, 25 mm journal length, incremental angle measuring system with sin/cos signal transmission, 8192 lines/revolution, slotless, brushless 3-phase torque motor