Compact, inexpensive inertia drive principle (stick-slip). At rest, the drive is self-locking, requires no current, and does not generate any heat. It holds the position with maximum force.
Stable alignment of optical paths. Long-term positioning stability: High stability at target position, reliable startup even after longer downtimes. High holding force and resolution by combining piezo actuators with mechanical thread translation. Vacuum-compatible versions to 10-6 hPa available.
An incremental encoder measures the relative motion to a freely definable reference position.
| Motion | Filter | N-472.110 | N-472.110Y | N-472.11V | N-472.120 | N-472.120Y | N-472.12V | Tolerance |
|---|---|---|---|---|---|---|---|---|
| Active axes | X | X | X | X | X | X | ||
| Travel range in X | 7 mm | 7 mm | 7 mm | 7 mm | 7 mm | 7 mm | ||
| Maximum velocity in X, unloaded | 2 mm/min | 2 mm/min | 2 mm/min | 2 mm/min | 2 mm/min | 2 mm/min | ||
| Typical velocity in X, unloaded | 0.4 mm/min | 0.4 mm/min | 0.4 mm/min | 0.4 mm/min | 0.4 mm/min | 0.4 mm/min | ||
| Linearity error in X | 0.3 % | 0.3 % | 0.3 % | 0.3 % | 0.3 % | 0.3 % | typ. | |
| Positioning | Filter | N-472.110 | N-472.110Y | N-472.11V | N-472.120 | N-472.120Y | N-472.12V | Tolerance |
| Minimum incremental motion in X | 50 nm | 50 nm | 50 nm | 50 nm | 50 nm | 50 nm | typ. | |
| Unidirectional repeatability in X | ± 200 nm | ± 200 nm | ± 200 nm | ± 200 nm | ± 200 nm | ± 200 nm | typ. | |
| Integrated sensor | Incremental angle-measuring system | Incremental angle-measuring system | Incremental angle-measuring system | Incremental angle-measuring system | Incremental angle-measuring system | Incremental angle-measuring system | ||
| Sensor signal | Sin/cos, 1 V peak-peak | Sin/cos, 1 V peak-peak | Sin/cos, 1 V peak-peak | Sin/cos, 1 V peak-peak | Sin/cos, 1 V peak-peak | Sin/cos, 1 V peak-peak | ||
| Drive Properties | Filter | N-472.110 | N-472.110Y | N-472.11V | N-472.120 | N-472.120Y | N-472.12V | Tolerance |
| Drive type | Piezoelectric inertia drive | Piezoelectric inertia drive | Piezoelectric inertia drive | Piezoelectric inertia drive | Piezoelectric inertia drive | Piezoelectric inertia drive | ||
| Operating voltage, peak-to-peak | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | ||
| Maximum power consumption | 5 W | 5 W | 5 W | 5 W | 5 W | 5 W | ||
| Drive force in positive direction of motion in X | 22 N | 22 N | 22 N | 22 N | 22 N | 22 N | max. | |
| Maximum operating frequency during continuous operation | 400 Hz | 400 Hz | 200 Hz | 400 Hz | 400 Hz | 200 Hz | ||
| Short-term maximum operating frequency | 2000 Hz | 2000 Hz | 2000 Hz | 2000 Hz | 2000 Hz | 2000 Hz | ||
| Mechanical Properties | Filter | N-472.110 | N-472.110Y | N-472.11V | N-472.120 | N-472.120Y | N-472.12V | Tolerance |
| Holding force in X, passive | 100 N | 100 N | 100 N | 100 N | 100 N | 100 N | min. | |
| Overall mass | 200 g | 200 g | 250 g | 200 g | 200 g | 250 g | ||
| Material | Screw: Stainless steel. Housing: Aluminum, bronze. | Screw: Stainless steel. Housing: Aluminum, bronze. | Screw: Stainless steel. Housing: Stainless steel, bronze. | Screw: Stainless steel. Housing: Aluminum, bronze. | Screw: Stainless steel. Housing: Aluminum, bronze. | Screw: Stainless steel. Housing: Stainless steel, bronze. | ||
| Mechanical interface | M10×1 mounting thread | M10×1 mounting thread | M10×1 mounting thread | 9.5 mm clamping shank | 9.5 mm clamping shank | 9.5 mm clamping shank | ||
| Miscellaneous | Filter | N-472.110 | N-472.110Y | N-472.11V | N-472.120 | N-472.120Y | N-472.12V | Tolerance |
| Operating temperature range | 10 to 40 °C | 10 to 40 °C | 10 to 40 °C | 10 to 40 °C | 10 to 40 °C | 10 to 40 °C | ||
| Connector | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | D-sub 15-pin (m) | ||
| Cable length | 2 m | 2 m | 1 m | 2 m | 2 m | 1 m | ||
| Recommended controllers / drivers | E-873.1AT | E-873.1AT | E-873.1AT | E-873.1AT | E-873.1AT | E-873.1AT | ||
| Vacuum class | 10⁻⁶ hPa | 10⁻⁶ hPa |