Multi-Axis Piezo Flexure Stages / XYZ Piezo Nanopositioning Stages / Flexure Guided Stages

The multi-axis piezo flexure stages from PI enable positioning and scanning in up to 6 axes, including tip, tilt, and yaw motion, with sub-nanometer accuracy. Versions range from the smallest possible cube design to low profile and huge aperture.

High performance motion is offered by multi-axis piezo nanopositioning stages for a range of commercial and academic applications. The accuracy and speed of XYZ piezo stages have long been essential components of systems connected to semiconductor metrology and high-resolution scanning microscopy. These extremely accurate, quick positioners and scanners allow for the creation of micro-structures using two-photon polymerization, 3D nano-printing, and 3D lithography. Flexure guides can cover travel lengths from a few microns to millimeters. Precision placement of optics, photonics components, fibers, laser diodes, and biological samples is well suited for XYZ Piezo nanopositioners.

What are the sample application areas of Multi-Axis Piezo Flexure Stages?

Fiber positioning and alignment, Scanning microscopy, 2-photon polymerization, Nanotechnology and nanomanufacturing, Photonics / integrated optics, Micromanipulation, Sample positioning , Mask/wafer positioning, Nanopositioning with high flatness and straightness of motion, Lithography, Super-resolution microscopy , Metrology, Interferometry Super-resolution microscopy , Metrology, Interferometry

XYZ Compact Piezo Cubes

P-616 NanoCube^® Nanopositioner Compact Parallel-Kinematic Nanopositioner for Fiber Alignment and Scanning Microscopy

P-611.3 NanoCube® XYZ Nanopositioner Compact Multi-Axis Piezo Positioner for Nanopositioning and Fiber Alignment

XYZ Piezo Stages with Aperture

P-733.3 XYZ Piezo Nanopositioner High-Precision XYZ Scanner with Aperture

P-561 • P-562 • P-563 PIMars Nanopositioning Stage High-Precision Nanopositioner for up to 3 Axes

P-517 • P-527 Multi-Axis Piezo Scanner High Dynamics Nanopositioner / Scanner with Direct Position Measuring

Z / Tip / Tilt Piezo Flexure Stages

P-518 • P-528 • P-558 Piezo Z/Tip/Tilt Stage High Dynamics with Large Aperture

6- Axis Piezo Stages

P-562.6CD PIMars 6-Axis Nanopositioning Stage High-Precision Nanopositioner with 6 Degrees of Freedom