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Products PI - Nanopositioning Piezo Flexure Stages Linear Piezo Flexure Stages

Linear Piezo Flexure Stages / Linear Piezo Stages for Nanopositioning (Flexure Guided)

The nanopositioning stages and scanners from PI combine guiding precision and nanometer-precise resolution with little crosstalk. Because of this, they are especially well suited for reference applications in metrology, microscopic processes, interferometry, or inspection systems for semiconductor chip manufacturing.

For travel ranges up to 1.5 mm, linear piezo stages with PICMA® piezo actuator drive and flexure guidings are offered.

Flexure-guided nanopositioning mechanisms are powered by integrated piezo stacks and are illustrated by the linear piezo stages. There are direct-drive versions that have a quicker reaction and more rigidity, as well as motion-amplified variants that have a wider travel range. In comparison to linear stages using mechanical guiding mechanisms, flexure-guided piezo stages offer improved straightness and flatness of motion and are frictionless, backlash-free, and maintenance-free. Non-contacting position sensors are integrated in the piezo linear stages to give closed-loop control with our line of sophisticated piezo servo controllers for the best linearity, resolution, and repeatability in the nanoscale range.

The piezo flexure nanopositioners from PI have zero-wear components and offer great responsiveness, step/settle times typically in the millisecond range (and below for direct drive mechanisms), little tilt, and out-of-plane motion.

Piezo Flexure Linear Stages

P-621.1U • P-625.1U PIHera Linear Precision Positioner Vacuum Compatible and with Variable Travel Ranges and Axis Configuration
P-620.Z • P-622.Z PIHera Vertical Precision Positioner Variable Travel Ranges and Axis Configuration
P-753 LISA Linear Actuator and Positioning Stage Dynamic and Stable in Position
P-752 High-Precision Nanopositioning Stage Highly Dynamic and Stable Piezo Scanner with Extremely Accurate Guiding
P-750 Piezo Nanopositioner High-Load Piezo-Driven Nanopositioner with Direct Metrology
P-733.Z High Dynamics Z Nanopositioning Stage Direct Position Measuring and Clear Aperture
P-612.Z Piezo Z Stage Compact Nanopositioner with Aperture
P-611.1 Linear Piezo Positioner Inexpensive, Compact Linear Stage
P-620.1 • P-629.1 PIHera Linear Precision Positioner Variable Travel Ranges and Axis Configuration
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Nano Dünya Mak. San. Tic. Ltd. Şti.
Parseller Mah. Gündoğan Sok. No:8/A
Ümraniye/İstanbul
 02166140039
 info@nanodunya.com.tr
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