Producs - Nano Dünya

V-62x High-Precision Rotation Stage with Direct Drive

Ideal for Indexing, Positioning, Scanning, Measuring Technology

Direct drive for efficient dynamic performance
Motion platform diameters of 85 mm, 110 mm, and 210 mm
Eccentricity and flatness < 1 µm
Can be used in any orientation
Low profile

Positioning accuracy (orange) and repeatability (blue) of V-622.A100

V-622.A100, dimensions in mm

V-622.B100, dimensions in mm

V-623.A100, dimensions in mm

V-623.B100, dimensions in mm

V-625, dimensions in mm

Product Description Description Specifications Downloads Quote/Order

Product overview

The direct-drive rotation stages of the V-62x series are designed for precision, high stiffness, a long lifetime, and ease of use, and can be mounted in any orientation. The V-62x stages offer superior performance regarding travel accuracy, flatness, and wobble. The ultra-precise deep groove ball bearings are preloaded and lubricated prior to delivery, meaning they are maintenance-free for the whole lifetime of the rotation stage.

Direct-drive torque motor

Torque motors are electromagnetic direct drives. They dispense with mechanical components in the drivetrain and transfer the drive force directly and friction-free to the motion platform. The drives reach high velocities and accelerations.

Absolute encoder (optional)

Absolute encoders supply explicit position information that enables immediate determination of the position. Therefore, no referencing is necessary when switching on and this increases efficiency and safety during operation.

Accessories and options

Encoder type
Single or multi-axis motion controllers and servo drives
Multi-axis assemblies

Application fields

Sample inspection. Precision microassembly. Research. Biotechnology. Semiconductor testing and inspection. Measuring technology. Automation technology. Device assembly. Laser micro processing. Sensor calibration and test.

Motion	V-622.A100	V-623.A100	V-625.A100	V-622.B100	V-623.B100	V-625.B100	Tolerance
Active axes	θZ	θZ	θZ	θZ	θZ	θZ
Rotation range in θZ	360 °	360 °	360 °	360 °	360 °	360 °
Maximum angular velocity in θZ, unloaded	1200 min⁻¹	1000 min⁻¹	200 min⁻¹	1200 min⁻¹	1000 min⁻¹	200 min⁻¹
Linear crosstalk in X with motion in θZ	± 2 µm	± 2 µm	± 2 µm	± 2 µm	± 2 µm	± 2 µm	typ.
Linear crosstalk in Y with motion in θZ	± 2 µm	± 2 µm	± 2 µm	± 2 µm	± 2 µm	± 2 µm	typ.
Linear crosstalk in Z with motion in θZ	± 2 µm	± 2 µm	± 2 µm	± 2 µm	± 2 µm	± 2 µm	typ.
Rotational crosstalk in θX with motion in θZ	± 20 µrad	± 20 µrad	± 20 µrad	± 20 µrad	± 20 µrad	± 20 µrad	typ.
Rotational crosstalk in θY with motion in θZ	± 20 µrad	± 20 µrad	± 20 µrad	± 20 µrad	± 20 µrad	± 20 µrad	typ.
Positioning	V-622.A100	V-623.A100	V-625.A100	V-622.B100	V-623.B100	V-625.B100	Tolerance
Positioning accuracy in θZ, calibrated	± 10 µrad	± 10 µrad	± 10 µrad	± 10 µrad	± 10 µrad	± 10 µrad	typ.
Bidirectional repeatability in θZ	5 µrad	5 µrad	5 µrad	5 µrad	5 µrad	5 µrad	typ.
Reference switch	1 / revolution, differential pulse over one sensor signal period, 1 V peak-peak	1 / revolution, differential pulse over one sensor signal period, 1 V peak-peak	1 / revolution, differential pulse over one sensor signal period, 1 V peak-peak
Integrated sensor	Incremental angle-measuring system	Incremental angle-measuring system	Incremental angle-measuring system	Absolute angle-measuring system	Absolute angle-measuring system	Absolute angle-measuring system
Sensor signal	Sin/cos, 1 V peak-peak	Sin/cos, 1 V peak-peak	Sin/cos, 1 V peak-peak	BiSS-C, 32-bit	BiSS-C, 32-bit	BiSS-C, 32-bit
Sensor signal periods / U	11840	15744	31488
Sensor resolution, rotational	0.13 µrad	0.097 µrad	0.049 µrad	0.0015 µrad	0.0015 µrad	0.0015 µrad
Drive Properties	V-622.A100	V-623.A100	V-625.A100	V-622.B100	V-623.B100	V-625.B100	Tolerance
Drive type	Ironless 3-phase torque motor	Ironless 3-phase torque motor	Ironless 3-phase torque motor	Ironless 3-phase torque motor	Ironless 3-phase torque motor	Ironless 3-phase torque motor
Peak voltage	80 V	80 V	80 V	80 V	80 V	80 V
Nominal current, RMS	4.9 A	4.6 A	4.3 A	4.9 A	4.6 A	4.3 A	typ.
Peak current, RMS	13.8 A	13.8 A	13.8 A	13.8 A	13.8 A	13.8 A	typ.
Drive torque in θZ	0.57 N·m	1.4 N·m	4.1 N·m	0.57 N·m	1.4 N·m	4.1 N·m
Peak torque in θZ	1.22 N·m	2.9 N·m	9.3 N·m	1.22 N·m	2.9 N·m	9.3 N·m
Torque constant	0.117 N·m/A	0.3 N·m/A	0.96 N·m/A	0.117 N·m/A	0.3 N·m/A	0.96 N·m/A	typ.
Resistance phase-phase	1.7 Ω	2.76 Ω	4.94 Ω	1.7 Ω	2.76 Ω	4.94 Ω	typ.
Inductance phase-phase	2.7 mH	5.2 mH	9.8 mH	2.7 mH	5.2 mH	9.8 mH
Back EMF, phase-phase, rotational	10 V/kRPM	25 V/kRPM	82 V/kRPM	10 V/kRPM	25 V/kRPM	82 V/kRPM	max.
Number of pole pairs	12	20	36	12	20	36
Mechanical Properties	V-622.A100	V-623.A100	V-625.A100	V-622.B100	V-623.B100	V-625.B100	Tolerance
Permissible push force in X	50 N	75 N	100 N	50 N	75 N	100 N	max.
Permissible push force in Y	50 N	75 N	100 N	50 N	75 N	100 N	max.
Permissible push force in Z	100 N	150 N	400 N	100 N	150 N	400 N	max.
Permissible torque in θx	5 N·m	10 N·m	20 N·m	5 N·m	10 N·m	20 N·m	max.
Permissible torque in θY	5 N·m	10 N·m	20 N·m	5 N·m	10 N·m	20 N·m	max.
Moment of inertia in θZ, unloaded	331 kg·mm²	1188 kg·mm²	26000 kg·mm²	331 kg·mm²	1188 kg·mm²	26000 kg·mm²	±20 %
Bearing type	Ball bearings	Ball bearings	Ball bearings	Ball bearings	Ball bearings	Ball bearings
Overall mass	1300 g	2400 g	11000 g	1300 g	2400 g	11000 g	±5 %
Material	Hardcoat aluminum (base body), stainless steel (bearing and mounting hardware)	Hardcoat aluminum (base body), stainless steel (bearing and mounting hardware)	Hardcoat aluminum (base body), stainless steel (bearing and mounting hardware)	Hardcoat aluminum (base body), stainless steel (bearing and mounting hardware)	Hardcoat aluminum (base body), stainless steel (bearing and mounting hardware)	Hardcoat aluminum (base body), stainless steel (bearing and mounting hardware)
Aperture diameter	20 mm	45 mm	100 mm	20 mm	45 mm	100 mm
Motion platform diameter	85 mm	110 mm	210 mm	85 mm	110 mm	210 mm
Height	50 mm	55 mm	50 mm	50 mm	55 mm	50 mm
Miscellaneous	V-622.A100	V-623.A100	V-625.A100	V-622.B100	V-623.B100	V-625.B100	Tolerance
Operating temperature range	5 to 50 °C	5 to 50 °C	5 to 50 °C	5 to 50 °C	5 to 50 °C	5 to 50 °C
Connector	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)
Sensor connector	D-sub 15-pin (m)	D-sub 15-pin (m)	D-sub 15-pin (m)	D-sub 15-pin (m)	D-sub 15-pin (m)	D-sub 15-pin (m)
Recommended controllers / drivers	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x

3D Models

V-62x 3D Model

Version / Date

zip - 2 MB

Download

Datasheet

Datasheet V-62x

Version / Date

2023-09-28
pdf - 3 MB

Download

Documentation

User Manual V620D0001

Version / Date

pdf - 828 KB

Download

V-622.A100

High-precision rotation stage with direct drive; ironless 3-phase torque motor; 360 ° rotational angle; 85 mm Ø motion platform; 100 N load capacity; 1200 min⁻¹ maximum angular velocity; incremental angle measuring system, 0.13 µrad sensor resolution, rotary, Sin/Cos, 1 V peak-peak