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N-216 NEXLINE® Linear Actuator

Nanopositioning Over Long Travel Ranges, With High Forces, PiezoWalk® Principle

Force generation to 600 N
Holding force to 800 N
Travel range 20 mm
Integrated direct-measuring linear encoder with resolution 5 nm

Comparison of the motion type of a NEXLINE® actuator: The nanostepping mode provides very smooth motion. Full step mode allows higher speed.

N-216, dimensions in mm

Product Description Description Specifications Downloads Quote/Order

Application fields

Industrial precision positioning
Semiconductor technology

Wafer inspection

Lithography

Nanoimprinting

Nanometrology

Motion in strong magnetic fields and in a vacuum

Highly accurate position measuring with incremental linear encoder

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Nanometer precision and high feed force with PiezoWalk^® walking drives

Several piezo actuators perform a walking motion in the PiezoWalk® walking drive that leads to forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.

Suitable for sophisticated vacuum applications

Piezo motors from PI can be designed for use in a vacuum and are suitable for operating in strong magnetic fields. Special versions of the drives are available for this purpose. Piezo walking drives can also be used in cleanrooms or in environments with strong ultraviolet radiation.

Motion	N-216.101	N-216.1A1	N-216.201	N-216.2A1	Tolerance
Active axes	X	X	X	X
Travel range in X	20 mm	20 mm	20 mm	20 mm
Travel range in X (analog mode)	± 3 µm	± 3 µm	± 3 µm	± 3 µm
Velocity (10% duty cycle, full-step mode)	1 mm/s	1 mm/s	1 mm/s	1 mm/s	max.
Velocity (100% duty cycle, full-step mode)	0.6 mm/s	0.6 mm/s	0.6 mm/s	0.6 mm/s	max.
Velocity (100% duty cycle, nanostepping mode)	0.4 mm/s	0.4 mm/s	0.4 mm/s	0.4 mm/s	max.
Positioning	N-216.101	N-216.1A1	N-216.201	N-216.2A1	Tolerance
Resolution in X, open loop	0.03 nm	0.03 nm	0.03 nm	0.03 nm	typ.
Integrated sensor		Incremental linear encoder		Incremental linear encoder
System resolution in X		5 nm		5 nm
Reference switch		Optical, direction sensing (reference edge track), 5 V, TTL		Optical, direction sensing (reference edge track), 5 V, TTL
Drive Properties	N-216.101	N-216.1A1	N-216.201	N-216.2A1	Tolerance
Operating voltage	-250 to +250	-250 to +250	-250 to +250	-250 to +250
Drive type	NEXLINE® piezo walking drive	NEXLINE® piezo walking drive	NEXLINE® piezo walking drive	NEXLINE® piezo walking drive
Drive force in X	300 N	300 N	600 N	600 N	max.
Mechanical Properties	N-216.101	N-216.1A1	N-216.201	N-216.2A1	Tolerance
Holding force in X, passive	400 N	400 N	800 N	800 N	min.
Overall mass	1150 g	1150 g	1250 g	1250 g
Material	Aluminum, stainless steel	Aluminum, stainless steel	Aluminum, stainless steel	Aluminum, stainless steel
Miscellaneous	N-216.101	N-216.1A1	N-216.201	N-216.2A1	Tolerance
Operating temperature range	0 to 55 °C	0 to 55 °C	0 to 55 °C	0 to 55 °C
Connector	D-sub 25-pin (m)	D-sub 25-pin (m)	D-sub 25-pin (m)	D-sub 25-pin (m)
Cable length	2 m	2 m	2 m	2 m	+50 / -0 mm
Recommended controllers / drivers	E-712.1AM	E-712.1AM	E-712.1AM	E-712.1AM

3D Models

N-216 3-D model

Version / Date

zip - 225 KB

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Datasheet

Datasheet N-216

Version / Date

2023-01-23
pdf - 819 KB

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Documentation

User Manual MP120

N-216 NEXLINE® Linear Actuator

Version / Date

1.1.0 2022-11-08
pdf - 2 MB

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N-216.101

NEXLINE® linear actuator; NEXLINE® piezo walking drive; 20 mm travel range; 300 N feed force; 2 m cable length

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N-216.1A1

NEXLINE® linear actuator; NEXLINE® piezo walking drive; 20 mm travel range; 300 N feed force; incremental linear encoder; 2 m cable length

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N-216.201

NEXLINE® linear actuator; NEXLINE® piezo walking drive; 20 mm travel range; 600 N feed force; 2 m cable length

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N-216.2A1

NEXLINE® linear actuator; NEXLINE® piezo walking drive; 20 mm travel range; 600 N feed force; incremental linear encoder; 2 m cable length

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Application fields

Highly accurate position measuring with incremental linear encoder

Nanometer precision and high feed force with PiezoWalk® walking drives

Suitable for sophisticated vacuum applications

Nanometer precision and high feed force with PiezoWalk^® walking drives