Producs - Nano Dünya

N-331 PICMAWalk Walking Drive

OEM Walking Drive for Durable Applications with up to 10 mm/s Velocity and 50 N Drive Force

Robust walking drive for industrial use with PICMA® technology for extreme durability
Fastest and strongest drive of its size class
Variable runner lengths from 25 mm to 100 mm
Precise, nanometer precision positioning of loads up to 5 kg
Plug-and-play, thanks to PI proprietary controller technology
Vacuum versions to 10^-9 hPa available

The N-331 drive reliably performs repeatable 10-nm steps. Measured by an interferometer.

N-331.xx, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Product Description Description Specifications Downloads Quote/Order

Application fields

Industrial precision positioning
Semiconductor technology
Semiconductor tests
Wafer inspection
Lithography
Nanoimprinting
Nanometrology

Outstanding lifetime due to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Nanometer precision and high feed force with PiezoWalk® walking drives

In the PiezoWalk® walking drive, several piezo actuators do a walking motion that leads to a forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.

Highly accurate position measuring with incremental linear encoder

Noncontact optical linear encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Motion	N-331.10	N-331.13	N-331.20	N-331.23	N-331.40	N-331.43	Tolerance
Active axes	X	X	X	X	X	X
Travel range in X, open loop	30 mm	30 mm	55 mm	55 mm	105 mm	105 mm	±0,5 mm
Travel range in X (analog mode)	20 µm	20 µm	20 µm	20 µm	20 µm	20 µm	typ.
Maximum velocity in X, unloaded	10 mm/s	10 mm/s	10 mm/s	10 mm/s	10 mm/s	10 mm/s
Operating frequency in full step mode	0.6 kHz	0.6 kHz	0.6 kHz	0.6 kHz	0.6 kHz	0.6 kHz
Travel range in X		25 mm		50 mm		100 mm
Positioning	N-331.10	N-331.13	N-331.20	N-331.23	N-331.40	N-331.43	Tolerance
System resolution in X	10 nm	10 nm	10 nm	10 nm	10 nm	10 nm
Resolution in X, open loop	0.02 nm	0.02 nm	0.02 nm	0.02 nm	0.02 nm	0.02 nm	typ.
Minimum incremental motion in X	0.01 µm	0.01 µm	0.01 µm	0.01 µm	0.01 µm	0.01 µm	typ.
Integrated sensor		Incremental linear encoder		Incremental linear encoder		Incremental linear encoder
Drive Properties	N-331.10	N-331.13	N-331.20	N-331.23	N-331.40	N-331.43	Tolerance
Operating voltage	-20 to 120	-20 to 120	-20 to 120	-20 to 120	-20 to 120	-20 to 120
Drive type	PICMAWalk	PICMAWalk	PICMAWalk	PICMAWalk	PICMAWalk	PICMAWalk
Drive force in positive direction of motion in X	50 N	50 N	50 N	50 N	50 N	50 N	min.
Drive force in negative direction of motion in X	50 N	50 N	50 N	50 N	50 N	50 N	min.
Mechanical Properties	N-331.10	N-331.13	N-331.20	N-331.23	N-331.40	N-331.43	Tolerance
Holding force in X, passive	60 N	60 N	60 N	60 N	60 N	60 N	min.
Moved mass in X, unloaded	110 g	110 g	140 g	140 g	190 g	190 g
Overall mass	580 g	580 g	610 g	610 g	660 g	660 g
Material	Aluminum, stainless steel	Aluminum, stainless steel	Aluminum, stainless steel	Aluminum, stainless steel	Aluminum, stainless steel	Aluminum, stainless steel
Endurance at 1013 hPa, 2 kg payload, 70% duty cycle	> 30 km	> 30 km	> 30 km	> 30 km	> 30 km	> 30 km
Miscellaneous	N-331.10	N-331.13	N-331.20	N-331.23	N-331.40	N-331.43	Tolerance
Operating temperature range	0 to 50 °C	0 to 50 °C	0 to 50 °C	0 to 50 °C	0 to 50 °C	0 to 50 °C
Connector	D-sub 37-pin (m)	D-sub 37-pin (m)	D-sub 37-pin (m)	D-sub 37-pin (m)	D-sub 37-pin (m)	D-sub 37-pin (m)
Cable length	2 m	2 m	2 m	2 m	2 m	2 m
Recommended controllers / drivers	E-712.1AN • E-712.2AN • E-712.3AN	E-712.1AN • E-712.2AN • E-712.3AN	E-712.1AN • E-712.2AN • E-712.3AN	E-712.1AN • E-712.2AN • E-712.3AN	E-712.1AN • E-712.2AN • E-712.3AN	E-712.1AN • E-712.2AN • E-712.3AN

3D Models

N-331 3-D model

Version / Date

zip - 1 MB

Add to List Remove from List

Datasheet

Datasheet N-331

Version / Date

2023-04-05
pdf - 799 KB

Download

Documentation

User Manual PZ271

N-331 Piezoelectric Walking Drive PICMAWalk

Version / Date

1.1.4 2023-03-31
pdf - 2 MB

Add to List Remove from List

White Papers

Controlling PI Positioners with External Zygo Interferometers

Version / Date

WP4017E 2022-07
pdf - 637 KB

Download

N-331.10

PICMAWalk walking drive; 30 mm travel range (open loop); 50 N drive force; 10 mm/s maximum velocity; 2 m cable length