Producs - Nano Dünya

P-541.2 • P-542.2 XY Piezo Stage

Low-Profile XY Nanopositioner with Large Aperture

Low overall height for easy integration: 16.5 mm
Aperture 80 mm × 80 mm
Travel range up to 200 µm × 200 µm
Parallel kinematics for faster response times and higher multi-axis accuracy
High dynamics direct-drive version
Sensor technology: Inexpensive strain gauge sensors or capacitive sensors for higher performance
Outstanding lifetime thanks to PICMA® piezo actuators
Combination possible with microscope stages for longer travel ranges

The P-541.2DD has a settling time of only 3 ms for a 50-µm step.

P-541.2 • P-542.2, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Product Description Description Specifications Downloads Quote/Order

Application fields

Scanning microscopy
High-throughput microscopy
Super-resolution microscopy
Mask / wafer positioning
Interferometry
Measuring technology
Biotechnology
Micromanipulation

Outstanding lifetime due to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.

Automatic configuration and fast component exchange

Mechanics and controllers can be can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the mechanics' D-sub connector. The auto calibration function on the digital controller automatically uses this data every time the controller is switched on.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimal repeatability, outstanding stability, and stiff, fast-responding control.

High dynamics multi-axis operation due to parallel kinematics

In a parallel-kinematic multi-axis system, all actuators act on a common platform. The minimum mass inertia and the identical design of all axes allow fast, dynamic, and nevertheless precision motion.

Motion	P-541.2CD	P-541.2CL	P-542.2CD	P-542.2CL	P-541.2DD	P-541.2SL	P-542.2SL	P-541.20L	P-542.20L	Tolerance
Active axes	X Y	X Y	X Y	X Y	X Y	X Y	X Y	X Y	X Y
Travel range in X	100 µm	100 µm	200 µm	200 µm	45 µm	100 µm	200 µm
Travel range in Y	100 µm	100 µm	200 µm	200 µm	45 µm	100 µm	200 µm
Travel range in X, open loop, at -20 to 120 V	150 µm	150 µm	250 µm	250 µm	60 µm	150 µm	250 µm	150 µm	250 µm	+20 / -0 %
Travel range in Y, open loop, at -20 to +120 V	150 µm	150 µm	250 µm	250 µm	60 µm	150 µm	250 µm	150 µm	250 µm	+20 / -0 %
Linearity error	0.03 %	0.03 %	0.03 %	0.03 %	0.03 %	0.2 %	0.2 %			typ.
Pitch (Rotational crosstalk in θX with motion in Y)	< 5 µrad	< 5 µrad	< 5 µrad	< 5 µrad	< 3 µrad	< 5 µrad	< 5 µrad	< 5 µrad	< 5 µrad	typ.
Pitch (Rotational crosstalk in θY with motion in X)	< 5 µrad	< 5 µrad	< 5 µrad	< 5 µrad	< 3 µrad	< 5 µrad	< 5 µrad	< 5 µrad	< 5 µrad	typ.
Yaw (Rotational crosstalk in θZ with motion in X)	< 10 µrad	< 10 µrad	< 10 µrad	< 10 µrad	< 3 µrad	< 10 µrad	< 10 µrad	< 10 µrad	< 10 µrad	typ.
Yaw (Rotational crosstalk in θZ with motion in Y)	< 10 µrad	< 10 µrad	< 10 µrad	< 10 µrad	< 3 µrad	< 10 µrad	< 10 µrad	< 10 µrad	< 10 µrad	typ.
Positioning	P-541.2CD	P-541.2CL	P-542.2CD	P-542.2CL	P-541.2DD	P-541.2SL	P-542.2SL	P-541.20L	P-542.20L	Tolerance
Repeatability	< 5 nm	< 5 nm	< 5 nm	< 5 nm	< 5 nm	< 10 nm	< 10 nm			typ.
Resolution in X, open loop	0.2 nm	0.2 nm	0.4 nm	0.4 nm	0.1 nm	0.2 nm	0.4 nm	0.2 nm	0.4 nm	typ.
Resolution in Y, open loop	0.2 nm	0.2 nm	0.4 nm	0.4 nm	0.1 nm	0.2 nm	0.4 nm	0.2 nm	0.4 nm	typ.
Integrated sensor	Capacitive, direct position measuring	Capacitive, direct position measuring	Capacitive, direct position measuring	Capacitive, direct position measuring	Capacitive, direct position measuring	SGS, indirect position measuring	SGS, indirect position measuring
System resolution in X	0.3 nm	0.3 nm	0.7 nm	0.7 nm	0.3 nm	2.5 nm	4 nm			typ.
System resolution in Y	0.3 nm	0.3 nm	0.7 nm	0.7 nm	0.3 nm	2.5 nm	4 nm			typ.
Drive Properties	P-541.2CD	P-541.2CL	P-542.2CD	P-542.2CL	P-541.2DD	P-541.2SL	P-542.2SL	P-541.20L	P-542.20L	Tolerance
Drive type	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®
Electrical capacitance in X	4.2 µF	4.2 µF	7.5 µF	7.5 µF	9 µF	4.2 µF	7.5 µF	4.2 µF	7.5 µF	±20 %
Electrical capacitance in Y	4.2 µF	4.2 µF	7.5 µF	7.5 µF	9 µF	4.2 µF	7.5 µF	4.2 µF	7.5 µF	±20 %
Mechanical Properties	P-541.2CD	P-541.2CL	P-542.2CD	P-542.2CL	P-541.2DD	P-541.2SL	P-542.2SL	P-541.20L	P-542.20L	Tolerance
Stiffness in X	0.47 N/µm	0.47 N/µm	0.4 N/µm	0.4 N/µm	10 N/µm	0.47 N/µm	0.4 N/µm	0.47 N/µm	0.4 N/µm	±20 %
Stiffness in Y	0.47 N/µm	0.47 N/µm	0.4 N/µm	0.4 N/µm	10 N/µm	0.47 N/µm	0.4 N/µm	0.47 N/µm	0.4 N/µm	±20 %
Resonant frequency in X, unloaded	255 Hz	255 Hz	230 Hz	230 Hz	1550 Hz	255 Hz	230 Hz	255 Hz	230 Hz	±20 %
Resonant frequency in X, under load with 100 g	200 Hz	200 Hz	190 Hz	190 Hz		200 Hz	190 Hz	200 Hz	190 Hz	±20 %
Resonant frequency in X, under load with 200 g	180 Hz	180 Hz			1230 Hz	180 Hz		180 Hz		±20 %
Resonant frequency in X, under load with 300 g	150 Hz	150 Hz	145 Hz	145 Hz		150 Hz	145 Hz	150 Hz	145 Hz	±20 %
Resonant frequency in Y, unloaded	255 Hz	255 Hz	230 Hz	230 Hz	1550 Hz	255 Hz	230 Hz	255 Hz	230 Hz	±20 %
Resonant frequency in Y, under load with 100 g	200 Hz	200 Hz	190 Hz	190 Hz		200 Hz	190 Hz	200 Hz	190 Hz	±20 %
Resonant frequency in Y, under load with 200 g	180 Hz	180 Hz			1230 Hz	180 Hz		180 Hz		±20 %
Resonant frequency in Y, under load with 300 g	150 Hz	150 Hz	145 Hz	145 Hz		150 Hz	145 Hz	150 Hz	145 Hz	±20 %
Permissible push force in X	100 N	100 N	100 N	100 N	100 N	100 N	100 N	100 N	100 N	max.
Permissible push force in Y	100 N	100 N	100 N	100 N	100 N	100 N	100 N	100 N	100 N	max.
Permissible push force in Z	20 N	20 N	20 N	20 N	20 N	20 N	20 N	20 N	20 N	max.
Permissible pull force in X	30 N	30 N	30 N	30 N	30 N	30 N	30 N	30 N	30 N	max.
Permissible pull force in Y	30 N	30 N	30 N	30 N	30 N	30 N	30 N	30 N	30 N	max.
Guide	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with direct drive	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification
Overall mass	750 g	750 g	750 g	750 g	750 g	730 g	730 g	700 g	700 g	±5 %
Material	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum
Miscellaneous	P-541.2CD	P-541.2CL	P-542.2CD	P-542.2CL	P-541.2DD	P-541.2SL	P-542.2SL	P-541.20L	P-542.20L	Tolerance
ID chip detection	Yes		Yes		Yes
Operating temperature range	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C
Connector	D-sub 25W3 (m)	LEMO FFS.00.250.CTCE24	D-sub 25W3 (m)	LEMO FFS.00.250.CTCE24	D-sub 25W3 (m)	LEMO FFS.00.250.CTCE24	LEMO FFS.00.250.CTCE24	LEMO FFS.00.250.CTCE24	LEMO FFS.00.250.CTCE24
Cable length	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	±10 mm
Recommended controllers / drivers	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-621, E-712, E-727
Sensor connector		LEMO FFA.00.250.CTLC 17		LEMO FFA.00.250.CTLC 17		LEMO FFA.0S.304.CLAC32	LEMO FFA.0S.304.CLAC32

3D Models

P-541.2 3-D model

Version / Date

zip - 3 MB

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3D Models

P-542.2 3-D model

Version / Date

zip - 3 MB

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Datasheet

Datasheet P-541.2 • P-542.2

Version / Date

2023-05-11
pdf - 725 KB

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Documentation

Short Instructions PZ240

Piezo Positioning Systems: P-5xx / P-6xx / P-7xx

Version / Date

6.1.0 10/2019
pdf - 1 MB

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Documentation

User Manual PZ244

P-541/P-542 Nanopositioners

Version / Date

1.2.0 2020-07-27
pdf - 1 MB

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Product Note

Product Change Notification Piezo Actuator Driven Products

Version / Date

2021-04-19
pdf - 377 KB

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Brochures

Microscope Stage Configurator

Sample Stages and Holders for Inverted Microscopes

Version / Date

BRO70E R3D
pdf - 4 MB

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P-541.2CD

XY piezo stage; 100 µm × 100 µm travel range (X × Y); capacitive, direct position measuring; D-sub 25W3 (m) connector; 1.5 m cable length