Producs - Nano Dünya

H-824.V Vacuum-Compatible 6-Axis Hexapod

Compact and Precise

Load capacity to 5 kg, self-locking version
Travel ranges to 45 mm / 25°
Minimum incremental motion to 0.3 µm
Repeatability to ±0.1 µm / ±2 µrad
Velocity to 12.5 mm/s

H-824, dimensions in mm, at zero position of nominal travel range

Product Description Description Specifications Downloads Quote/Order

Precision-class 6-axis positioning system

Parallel-kinematic design for six degrees of freedom, making it significantly more compact and stiff than serial-kinematic systems, higher dynamics, no moved cables: Higher reliability, reduced friction. suitable for vacuum environments to 10^-6 hPa.

Compact due to folded drive design

PI Hexapod Simulation Tool

The simulation software simulates the limits of the workspace and load capacity of a hexapod. Therefore, even before purchasing, you can check whether a particular hexapod model can handle the loads, forces, and torques occurring in an application. For this purpose, the simulation tool takes the position and motion of the hexapod as well as the pivot point and several reference coordinate systems into account.

Application fields

Industry and research. For micromanipulation, biotechnology, semiconductor manufacturing

Motion	H-824.D2V	H-824.G2V	Tolerance
Active axes	X Y Z θX θY θZ	X Y Z θX θY θZ
Travel range in X	± 22.5 mm	± 22.5 mm
Travel range in Y	± 22.5 mm	± 22.5 mm
Travel range in Z	± 12.5 mm	± 12.5 mm
Rotation range in θX	± 7.5 °	± 7.5 °
Rotation range in θY	± 7.5 °	± 7.5 °
Rotation range in θZ	± 12.5 °	± 12.5 °
Maximum velocity in X	12.5 mm/s	0.5 mm/s
Maximum velocity in Y	12.5 mm/s	0.5 mm/s
Maximum velocity in Z	12.5 mm/s	0.5 mm/s
Maximum angular velocity in θX	135 mrad/s	5.5 mrad/s
Maximum angular velocity in θY	135 mrad/s	5.5 mrad/s
Maximum angular velocity in θZ	135 mrad/s	5.5 mrad/s
Typical velocity in X	5 mm/s	0.2 mm/s
Typical velocity in Y	5 mm/s	0.2 mm/s
Typical velocity in Z	5 mm/s	0.2 mm/s
Typical angular velocity in θX	28 mrad/s	2.3 mrad/s
Typical angular velocity in θY	28 mrad/s	2.3 mrad/s
Typical angular velocity in θZ	28 mrad/s	2.3 mrad/s
Positioning	H-824.D2V	H-824.G2V	Tolerance
Unidirectional repeatability in X	± 0.5 µm	± 0.4 µm	typ.
Unidirectional repeatability in Y	± 0.5 µm	± 0.4 µm	typ.
Unidirectional repeatability in Z	± 0.15 µm	± 0.1 µm	typ.
Unidirectional repeatability in θX	± 3 µrad	± 2 µrad	typ.
Unidirectional repeatability in θY	± 3 µrad	± 2 µrad	typ.
Unidirectional repeatability in θZ	± 2.5 µrad	± 3 µrad	typ.
Minimum incremental motion in X	2 µm	0.3 µm	typ.
Minimum incremental motion in Y	2 µm	0.3 µm	typ.
Minimum incremental motion in Z	1 µm	0.3 µm	typ.
Minimum incremental motion in θX	12 µrad	3.5 µrad	typ.
Minimum incremental motion in θY	12 µrad	3.5 µrad	typ.
Minimum incremental motion in θZ	14 µrad	3.5 µrad	typ.
Backlash in X	3 µm	5 µm	typ.
Backlash in Y	3 µm	5 µm	typ.
Backlash in Z	1.5 µm	1.5 µm	typ.
Backlash in θX	20 µrad	30 µrad	typ.
Backlash in θY	20 µrad	30 µrad	typ.
Backlash in θZ	60 µrad	45 µrad	typ.
Drive Properties	H-824.D2V	H-824.G2V	Tolerance
Drive type	DC motor	DC gear motor
Nominal voltage	24 V	24 V
Mechanical Properties	H-824.D2V	H-824.G2V	Tolerance
Stiffness in X	1.7 N/µm	1.7 N/µm
Stiffness in Y	1.7 N/µm	1.7 N/µm
Stiffness in Z	7 N/µm	7 N/µm
Maximum holding force, base plate in any orientation	5 N	25 N
Maximum holding force, base plate horizontal	15 N	50 N
Maximum load capacity, base plate in any orientation	1.25 kg	2.5 kg
Maximum load capacity, base plate horizontal	2.5 kg	5 kg
Overall mass	8 kg	8 kg
Material	Aluminum	Aluminum
Miscellaneous	H-824.D2V	H-824.G2V	Tolerance
Connector for supply voltage	LEMO	LEMO
Vacuum class	10⁻⁶ hPa	10⁻⁶ hPa
Recommended controllers / drivers	C-887.5x	C-887.5x
Cable length	2 m	2 m
Operating temperature range	-10 to 50 °C	-10 to 50 °C
Maximum bake out temperature	80 °C	80 °C
Connector for data transmission	HD D-sub 78-pin (m)	HD D-sub 78-pin (m)

Technical data specified at 22±3 °C.

The maximum travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis shows its maximum travel range when all other axes are in the zero position of the nominal travel range and the default coordinate system is in use, or rather when the pivot point is set to 0,0,0.

For continuous operation in a vacuum, restrictions on operating parameters may be necessary due to heat generation.

Air-side connecting cables are not included in the scope of delivery and must be ordered separately.

Ask about customized versions.

3D Models

H-824.x2x 3-D model

Version / Date

2020-11-24
zip - 4 MB

Add to List Remove from List

Datasheet

Datasheet H-824.V

Version / Date

2022-09-12
pdf - 2 MB

Download

Documentation

Short Instructions MS247EK

Hexapod Systems: H-xxx Hexapod with C-887.5xx Controller

Version / Date

2.0.0 06/2020
pdf - 2 MB

Download

Documentation

User Manual MS200

H-824 Compact Microrobot

Version / Date

2.4.0 / 2023-01-11
pdf - 3 MB

Add to List Remove from List

Product Note

Product Change Notification Motor Driven Products

Version / Date

2021-04-19
pdf - 917 KB

Download

Product Note

Product Change Notification Hexapod Cables

Version / Date

2021-01-15
pdf - 186 KB

Download

Software File

Hexapod Simulation Tool

Version / Date

2022-01-26
zip - 18 MB

Add to List Remove from List

H-824.D2V

Compact hexapod microrobot, direct drive, 12.5 mm/s, 2.5 kg load, vacuum-compatible to 10-6 hPa, D-sub connector, cable set 2 m vacuum side, feedthrough. Air-side connecting cables are not included in the scope of delivery and must be ordered separately.

Add to Quote List Remove from Quote List

H-824.G2V

Compact hexapod microrobot, gearhead, 0.5 mm/s, 5 kg load, vacuum-compatible to 10-6 hPa, D-sub connector, cable set 2 m vacuum side, feedthrough. Air-side connecting cables are not included in the scope of delivery and must be ordered separately.

Add to Quote List Remove from Quote List