Producs - Nano Dünya

H-850.V Vacuum-Compatible 6-Axis Hexapod

For loads to 80 kg

Load capacity to 80 kg
Repeatability to ±0.2 µm
Travel ranges to ±50 mm / ±30°
Works in any orientation

H-850.V

H-850.V, dimensions in mm, at zero position of nominal travel range

Product Description Description Specifications Downloads Quote/Order

The hexapods suitable for vacuum of the H-850 series position loads of up to 80 kg with high precision and reliability. Heavy-duty precision bearings allow applications with long duty cycles.

The H-850.V are suitable for vacuum environments to 10^-6 hPa.

The parallel-kinematic design for six degrees of freedom makes it significantly more compact and stiffer than comparable serial kinematic systems. The advantages over serial, i.e., stacked systems, are mainly the much better path accuracy and repeatability. In addition, the moved mass is lower and allows improved dynamics which is the same for all motion axes. Cable management is not a problem because cables are not moved.

PI Hexapod Simulation Tool

The simulation software simulates the limits of the workspace and load capacity of a hexapod. Therefore, even before purchasing, you can check whether a particular hexapod model can handle the loads, forces, and torques occurring in an application. For this purpose, the simulation tool takes the position and motion of the hexapod as well as the pivot point and several reference coordinate systems into account.

Application fields

Industry and research. For astronomy, optics positioning, aerospace.

Motion	H-850.G2V	H-850.H2V	Tolerance
Active axes	X Y Z θX θY θZ	X Y Z θX θY θZ
Travel range in X	± 50 mm	± 50 mm
Travel range in Y	± 50 mm	± 50 mm
Travel range in Z	± 25 mm	± 25 mm
Rotation range in θX	± 15 °	± 15 °
Rotation range in θY	± 15 °	± 15 °
Rotation range in θZ	± 30 °	± 30 °
Maximum velocity in X	2.5 mm/s	0.15 mm/s
Maximum velocity in Y	2.5 mm/s	0.15 mm/s
Maximum velocity in Z	2.5 mm/s	0.15 mm/s
Maximum angular velocity in θX	30 mrad/s	1.8 mrad/s
Maximum angular velocity in θY	30 mrad/s	1.8 mrad/s
Maximum angular velocity in θZ	30 mrad/s	1.8 mrad/s
Typical velocity in X	2 mm/s	0.1 mm/s
Typical velocity in Y	2 mm/s	0.1 mm/s
Typical velocity in Z	2 mm/s	0.1 mm/s
Typical angular velocity in θX	25 mrad/s	1.2 mrad/s
Typical angular velocity in θY	25 mrad/s	1.2 mrad/s
Typical angular velocity in θZ	25 mrad/s	1.2 mrad/s
Positioning	H-850.G2V	H-850.H2V	Tolerance
Integrated sensor	Incremental rotary encoder	Incremental rotary encoder
Unidirectional repeatability in X	± 0.5 µm	± 0.5 µm	typ.
Unidirectional repeatability in Y	± 0.5 µm	± 0.5 µm	typ.
Unidirectional repeatability in Z	± 0.2 µm	± 0.2 µm	typ.
Unidirectional repeatability in θX	± 3 µrad	± 3 µrad	typ.
Unidirectional repeatability in θY	± 3 µrad	± 3 µrad	typ.
Unidirectional repeatability in θZ	± 7.5 µrad	± 9 µrad	typ.
Minimum incremental motion in X	1 µm	0.3 µm	typ.
Minimum incremental motion in Y	1 µm	0.3 µm	typ.
Minimum incremental motion in Z	0.5 µm	0.2 µm	typ.
Minimum incremental motion in θX	7.5 µrad	3 µrad	typ.
Minimum incremental motion in θY	7.5 µrad	3 µrad	typ.
Minimum incremental motion in θZ	15 µrad	5 µrad	typ.
Backlash in X	6 µm	4 µm	typ.
Backlash in Y	6 µm	4 µm	typ.
Backlash in Z	1.5 µm	0.5 µm	typ.
Backlash in θX	25 µrad	7.5 µrad	typ.
Backlash in θY	25 µrad	7.5 µrad	typ.
Backlash in θZ	90 µrad	60 µrad	typ.
Drive Properties	H-850.G2V	H-850.H2V	Tolerance
Drive type	DC gear motor with ActiveDrive	DC gear motor with ActiveDrive
Nominal voltage	24 V	24 V
Mechanical Properties	H-850.G2V	H-850.H2V	Tolerance
Drive screw type	Ball screw	Ball screw
Stiffness in X	7 N/µm	7 N/µm
Stiffness in Y	7 N/µm	7 N/µm
Stiffness in Z	100 N/µm	100 N/µm
Maximum holding force, base plate in any orientation	85 N	500 N
Maximum holding force, base plate horizontal	250 N	2000 N
Maximum load capacity, base plate in any orientation	10 kg	40 kg
Maximum load capacity, base plate horizontal	25 kg	80 kg
Overall mass	17 kg	17 kg
Material	Aluminum	Aluminum
Miscellaneous	H-850.G2V	H-850.H2V	Tolerance
Connector for supply voltage	M12 4-pin (m)	M12 4-pin (m)
Vacuum class	10⁻⁶ hPa	10⁻⁶ hPa
Recommended controllers / drivers	C-887.5xx	C-887.5xx
Cable length	2 m	2 m
Operating temperature range	-10 to 50 °C	-10 to 50 °C
Maximum bake out temperature	80 °C	80 °C
Connector for data transmission	HD D-sub 78-pin (m)	HD D-sub 78-pin (m)

3D Models

H-850.x2V 3-D model

Version / Date

2021-04-20
zip - 5 MB

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Datasheet

Datasheet H-850.V

Version / Date

2022-08-22
pdf - 2 MB

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Documentation

Short Instructions MS247EK

Hexapod Systems: H-xxx Hexapod with C-887.5xx Controller

Version / Date

2.0.0 06/2020
pdf - 2 MB

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Documentation

User Manual MS202

H-850 Hexapod Microrobot with Excellent Position Repeatability

Version / Date

2.4.2 2022-12-05
pdf - 5 MB

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Product Note

Product Change Notification Hexapod Cables

Version / Date

2021-01-15
pdf - 186 KB

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Product Note

Product Change Notification H-206.x1x, H-8xx.x1x, H-8xx.xVx, F-206.S

Version / Date

2019-04-04
pdf - 367 KB

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Software File

Hexapod Simulation Tool

Version / Date

2022-01-26
zip - 18 MB

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White Papers

Industrial Safety Device for Hexapods

How to Connect a Safety Light Barrier to a Hexapod System

Version / Date

WP4025E 2020-02
pdf - 1 MB

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H-850.G2V

Precision Hexapod microrobot, DC gear motor, rotary encoder, 25 kg load capacity, 2.5 mm/s velocity, vacuum compatible to 10-6 hPa, cable set 2 m vacuum side, feedthrough. Air side connecting cables are not included in the scope of delivery and must be ordered separately.

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H-850.H2V

Precision Hexapod microrobot, DC gear motor, rotary encoder, 80 kg load capacity, 0.15 mm/s velocity, vacuum compatible to 10-6 hPa, cable set 2 m vacuum side, feedthrough. Air side connecting cables are not included in the scope of delivery and must be ordered separately.

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