The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
| Motion | P-611.10 | P-611.1S | Tolerance |
|---|---|---|---|
| Active axes | X | X | |
| Travel range in X, open loop, at -20 to 120 V | 120 µm | 120 µm | +20 / -0 % |
| Flatness (Linear crosstalk in Z with motion in X) | 10 nm | 10 nm | typ. |
| Pitch (Rotational crosstalk in θY with motion in X) | ± 5 µrad | ± 5 µrad | typ. |
| Yaw (Rotational crosstalk in θZ with motion in X) | ± 20 µrad | ± 20 µrad | typ. |
| Travel range in X | 100 µm | ||
| Linearity error in X | 0.1 % | typ. | |
| Positioning | P-611.10 | P-611.1S | Tolerance |
| Repeatability in X | < 10 nm | < 10 nm | typ. |
| Resolution in X, open loop | 0.2 nm | 0.2 nm | typ. |
| Integrated sensor | SGS, indirect position measuring | ||
| System resolution in X | 2 nm | ||
| Drive Properties | P-611.10 | P-611.1S | Tolerance |
| Drive type | PICMA® | PICMA® | |
| Electrical capacitance in X | 1.5 µF | 1.5 µF | ±20 % |
| Mechanical Properties | P-611.10 | P-611.1S | Tolerance |
| Guide | Flexure guide with lever amplification | Flexure guide with lever amplification | |
| Stiffness in X | 0.2 N/µm | 0.2 N/µm | ±20 % |
| Resonant frequency in X, unloaded | 400 Hz | 400 Hz | ±20 % |
| Resonant frequency in X, under load with 30 g | 300 Hz | 300 Hz | ±20 % |
| Resonant frequency in X, under load with 100 g | 195 Hz | 195 Hz | ±20 % |
| Permissible push force in X | 15 N | 15 N | max. |
| Permissible push force in Z | 15 N | 15 N | max. |
| Permissible pull force in X | 10 N | 10 N | max. |
| Overall mass | 135 g | 135 g | ±5 % |
| Material | Aluminum, steel | Aluminum, steel | |
| Miscellaneous | P-611.10 | P-611.1S | Tolerance |
| Operating temperature range | -20 to 80 °C | -20 to 80 °C | |
| Connector | LEMO FFS.00.250.CTCE24 | LEMO FFS.00.250.CTCE24 | |
| Cable length | 1.5 m | 1.5 m | ±10 mm |
| Recommended controllers / drivers | E-503, E-505, E-610, E-621, E-625, E-665, E-836 | E-503, E-505, E-610, E-621, E-625, E-665, E-836 | |
| Sensor connector | LEMO FFA.0S.304.CLAC32 |