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P-621.1U • P-625.1U PIHera Linear Precision Positioner

Vacuum Compatible and with Variable Travel Ranges and Axis Configuration

Travel ranges 100 to 500 µm (600 µm open loop)
Resolution to 0.2 nm
Linearity error ≤0.03 %
XY combination possible UHV compatible to 10-9 hPa

Rapid scanning motion of a P-621.1CD (specified rise time: 5 ms) with a digital controller with 16-bit sensor resolution and DDL option. The digital dynamic linearization reduces the tracking error during scanning to <20 nm. The improvement over a standard PID controller is up to 3 orders of magnitude and increases with the frequency.

Product Description Description Specifications Downloads Quote/Order

Application fields

Interferometry
Microscopy
Nanopositioning
Biotechnology
Test applications
Semiconductor technology
Photonics
Fiber positioning

Suitable for sophisticated vacuum applications

All components used in the piezo systems are excellently suited for use in vacuum. No lubricant or grease is necessary for operating. Polymer-free piezo systems allow particularly low outgas rates.

Outstanding lifetime due to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimal repeatability, outstanding stability, and stiff, fast-responding control.

Motion	P-621.1U	P-622.1U	P-625.1U	Tolerance
Active axes	X	X	X
Travel range in X	100 µm	250 µm	500 µm
Travel range in X, open loop	120 µm	300 µm	600 µm	±20 %
Linearity error in X	0.02 %	0.02 %	0.03 %	typ.
Pitch (Rotational crosstalk in θY with motion in X)	± 3 µrad	± 3 µrad	± 6 µrad	typ.
Yaw (Rotational crosstalk in θZ with motion in X)	± 3 µrad	± 3 µrad	± 6 µrad	typ.
Positioning	P-621.1U	P-622.1U	P-625.1U	Tolerance
Integrated sensor	Capacitive, direct position measuring	Capacitive, direct position measuring	Capacitive, direct position measuring
System resolution in X	0.4 nm	0.7 nm	1.4 nm
Resolution in X, open loop	0.2 nm	0.4 nm	0.5 nm	typ.
Bidirectional repeatability in X	± 1 nm	± 1 nm	± 5 nm	typ.
Drive Properties	P-621.1U	P-622.1U	P-625.1U	Tolerance
Drive type	PICMA®	PICMA®	PICMA®
Electrical capacitance in X	1.5 µF	3.1 µF	6.2 µF	±20 %
Short-term maximum operating frequency	267 Hz	133 Hz	72 Hz
Mechanical Properties	P-621.1U	P-622.1U	P-625.1U	Tolerance
Guide	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification
Stiffness in X	0.35 N/µm	0.2 N/µm	0.1 N/µm	±20 %
Resonant frequency in X, under load with 120 g	240 Hz	185 Hz	110 Hz	±20 %
Resonant frequency in X, under load with 20 g	520 Hz	340 Hz	180 Hz	±20 %
Resonant frequency in X, unloaded	800 Hz	400 Hz	215 Hz	±20 %
Permissible push force in X	10 N	10 N	10 N	max.
Permissible push force in Y	10 N	10 N	10 N	max.
Permissible push force in Z	10 N	10 N	10 N	max.
Permissible pull force in X	10 N	10 N	10 N	max.
Overall mass	160 g	200 g	240 g
Material	Aluminum	Aluminum	Aluminum
Miscellaneous	P-621.1U	P-622.1U	P-625.1U	Tolerance
Connector	D-sub 5W1 (f)	D-sub 5W1 (f)	D-sub 5W1 (f)
Vacuum class	10⁻⁹ hPa	10⁻⁹ hPa	10⁻⁹ hPa
Recommended controllers / drivers	E-503, E-505, E-610, E-621, E-625, E-665, E-709, E-754	E-503, E-505, E-610, E-621, E-625, E-665, E-709, E-754	E-503, E-505, E-610, E-621, E-625, E-665, E-709, E-754
Cable length	1.5 m	1.5 m	1.5 m
Operating temperature range	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C

3D Models

P-62x.1 STEP

Version / Date

zip - 954 KB

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Datasheet

Datasheet P-621.1U • P-625.1U

Version / Date

2022-05-25
pdf - 706 KB

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Documentation

User Manual PZ234

P-620, P-621, P-622, P-625, P-628, P-629 PIHera Piezo Stages with Capacitive Sensors

Version / Date

1.3.0 2021-11-03
pdf - 3 MB

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P-621.1U

PIHera precision linear nanopositioner, 100 µm, direct position measuring, capacitive sensor, D-sub connector, vacuum-compatible to 10-9 hPa

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P-622.1U

PIHera precision linear nanopositioner, 250 µm, direct position measuring, capacitive sensor, D-sub connector, vacuum-compatible to 10-9 hPa

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P-625.1U

PIHera precision linear nanopositioner, 500 µm, direct position measuring, capacitive sensor, D-sub connector, vacuum-compatible to 10-9 hPa

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